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公开(公告)号：JPS62264051A
公开(公告)日：1987-11-17
申请号：JP2194587
申请日：1987-02-03
Applicant: BREWER SCIENCE INC
Inventor： GURETSUGU EE BAANZU , TERII BURIYUWAA , TONII DEII FURAIMU , MARII JII MOSU
IPC: G03F1/00 , C08G73/06 , C09D5/00 , C09D5/32 , C09D179/08 , G02F1/1335 , G03F1/08 , G03F1/10 , G03F7/09 , G03F9/00 , H01L21/027
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