公开(公告)号：JPH09120163A

公开(公告)日：1997-05-06

申请号：JP23009796

申请日：1996-08-30

Applicant: BREWER SCIENCE INC

Inventor： JIYON DABURIYUU AANORUDO ,  TERII ERU BURIYUUWAA ,  SUMARII PUNYAKUMURIAADO

IPC: G03F7/004 ,  G02B1/10 ,  G02B1/11 ,  G03F7/00 ,  G03F7/09 ,  G03F7/11 ,  G03F7/26 ,  G03F7/30 ,  H01L21/027 ,  H01L21/30

Abstract: PROBLEM TO BE SOLVED: To provide a thin and uniform coating which has strong adhesion property with an integrated circuit board and produces little residue as well as it has high absorption of light to avoid influences of static waves in the production of an integrated circuit. SOLUTION: This coating film contains a dye and one or more kinds of vehicles selected from polymers or copolymers of polyamide acid or combination of these. The vehicle is dissolved in a solvent having low surface energy selected from alcohols, aromatic hydrocarbons, ketones or esters or combination of these.

公开(公告)号：JPH06313968A

公开(公告)日：1994-11-08

申请号：JP19699693

申请日：1993-07-14

Applicant: BREWER SCIENCE INC

Inventor： JIYON DABURIYUU AANORUDO ,  TERII ERU BURIYUUWAA ,  SUMARII PUNYAKUMURIAADO

IPC: G03F7/004 ,  G02B1/10 ,  G02B1/11 ,  G03F7/00 ,  G03F7/09 ,  G03F7/11 ,  G03F7/26 ,  G03F7/30 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE: To provide an antireflection coating which not only eliminates the influence of standing waves at the time of producing integrated circuits by virtue of high light absorption bus has high adhesiveness to integrated circuit boards, is thin and uniform and has decreased residues. CONSTITUTION: This antireflection coating contains vehicles of one or more kinds selected from a group comprising a polymer of polyamide acid, its copolymer and their combinations and dyes. These vehicles are dissolved into a solvent having the low surface energy selected from a group consisting of alcohol, arom. hydrocarbon, ketone and ester or their combinations.