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公开(公告)号：EP1078227A1
公开(公告)日：2001-02-28
申请号：EP99922375.3
申请日：1999-05-20
Applicant: Bookham Technology PLC
Inventor： PECHSTEDT, Ralf-Dieter , McKENZIE, James, Stuart , LU, Yicheng , DE'ATH, James
Abstract: An optically addressed sensor system is described, which uses a Fabry-Pérot interferometer (4) to sense a measurand, by way of a cavity formed by (inter alia) a micromachined diaphragm (12), setting an optical path difference OPDS greater than the coherence length IC of a broadband optical source (1). The output is recovered by way of a further interferometer wiht a similar optical path difference OPDP. Thus, information is encoded in the wavelength domain, avoiding errors due to attenuation, loss, source variation etc. Suitable substrate arrangements are disclosed for the cavity which are suitable for mass production.
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公开(公告)号：EP1078227B1
公开(公告)日：2002-07-31
申请号：EP99922375.3
申请日：1999-05-20
Applicant: Bookham Technology PLC
Inventor： PECHSTEDT, Ralf-Dieter , McKENZIE, James, Stuart , LU, Yicheng , DE'ATH, James
Abstract: An optically addressed sensor system is described, which uses a Fabry-Pérot interferometer (4) to sense a measurand, by way of a cavity formed by (inter alia) a micromachined diaphragm (12), setting an optical path difference OPDS greater than the coherence length IC of a broadband optical source (1). The output is recovered by way of a further interferometer wiht a similar optical path difference OPDP. Thus, information is encoded in the wavelength domain, avoiding errors due to attenuation, loss, source variation etc. Suitable substrate arrangements are disclosed for the cavity which are suitable for mass production.
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公开(公告)号：EP0938643B1
公开(公告)日：2002-06-12
申请号：EP97912360.1
申请日：1997-11-14
Applicant: Bookham Technology PLC
Inventor： PECHSTEDT, Ralf-Dieter , McKENZIE, James Stuart , LU, Yicheng
CPC classification number: G02B6/423 , G01B9/02023 , G01B9/02028 , G01B9/02051 , G01B9/02057 , G01B9/02065 , G01B9/0209 , G01B2290/25 , G01B2290/45 , G01D5/266 , G01J9/02
Abstract: An interferometer integrated on a silicon-on-insulator chip (which comprises a layer of silicon (1) separated from a substrate (2) by a layer (3) of insulating material), the optical chip having integrated thereon fibre connection means (13) for connecting the optical chip to one or more optical fibres (6), the fibre connection means (13) comprising a groove (5) formed in the substrate (2) for receiving an optical fibre (6), waveguide means (4) for transmitting light to or from the fibre connection means (13), the waveguide means (14) comprising one or more rib waveguides (9) formed in the layer of silicon (1), and at least one phase modulator (14) for altering the phase of light travelling along a rib waveguide (9) on the chip, the arrangement being such as to form an interferometer in which light transmitted along different optical paths can be combined and the effective path length of at least one on the optical paths can be altered by means of the phase modulator (14).
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4.发明公开
公开(公告)号：EP1031065A1
公开(公告)日：2000-08-30
申请号：EP98954575.1
申请日：1998-11-12
Applicant: Bookham Technology PLC
Inventor： PECHSTEDT, Ralf-Dieter , LU, Yicheng
IPC: G02F1/225
CPC classification number: G02F1/0121 , G02F1/2257 , G02F2201/126
Abstract: The optical system comprises two optical paths (P1, P2), and an arrangement for changing the length of the two paths including two phase modulators (M1. M2) one coupled to each of the paths. A driving system (Figure 3) applies power to the phase modulators to drive them in the same direction and to change the amount of power applied to the phase modulators in opposite directions so as to change the length of each optical path in a different direction. As a result, the relationship between the changes in the amount of power applied to the modulators and the resulting changes in the phase of light beams passing through the device becomes substantially linear.
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