公开(公告)号：EP3255415A1

公开(公告)日：2017-12-13

申请号：EP16746464.3

申请日：2016-01-26

Applicant: Bosch Packaging Technology K.K.

Inventor： OKADA Takao ,  TANAKA Takashi ,  TAKESHITA Kosuke

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/8851 ,  G01N21/892 ,  G01N21/90 ,  G01N21/909 ,  G01N2021/8822 ,  G01N2021/8848 ,  G06T7/0002

Abstract: An inspection device 1 includes an illumination unit 2 for illuminating a subject T having a bright part T1 and a dark part T2 darker than the bright part T1, a light path dividing unit 3 for dividing object light from the subject T illuminated by the illumination unit 2 into first light L1 and second light L2 that pass through different light paths, a filter 4 for reducing the amount of the first light L1 having passed through the light path dividing unit 3, a first imaging unit 5a in which the first light L1 having passed through the filter 4 forms an image, a second imaging unit 5b in which the second light L2 having passed through the light path dividing unit 3 forms an image, and an inspection unit 7 for inspecting whether a defect is present in the subject based on information of the bright part taken by the first imaging unit 5a and information of the dark part taken by the second imaging unit 5b.

Abstract translation: 检查装置1具备照明部2，该照明部2用于对具有比明部T1暗的明部T1和暗部T2的被摄体T进行照明;光路分割部3，用于将来自被照明部T照明的被摄体T的被摄体光 2分离成通过不同光路的第一光L1和第二光L2，滤波器4，用于减少已经通过光路分割单元3的第一光L1的量;第一成像单元5a，其中第一光L1具有 穿过过滤器4形成图像，第二成像单元5b，其中已经通过光路分割单元3的第二光线L2形成图像;以及检查单元7，用于基于检查对象中是否存在缺陷 由第一成像单元5a拍摄的亮部分的信息和由第二成像单元5b拍摄的暗部分的信息。