Inspection device and inspection system

    公开(公告)号:US10408766B2

    公开(公告)日:2019-09-10

    申请号:US15547617

    申请日:2016-01-26

    Abstract: An inspection device includes an illumination unit for illuminating a subject having a bright part and a dark part darker than the bright part, a light path dividing unit for dividing object light from the subject illuminated by the illumination unit into first light and second light that pass through different light paths, a filter for reducing the amount of the first light having passed through the light path dividing unit, a first imaging unit in which the first light having passed through the filter forms an image, a second imaging unit in which the second light having passed through the light path dividing unit forms an image, and an inspection unit for inspecting whether a defect is present in the subject based on information of the bright part taken by the first imaging unit and information of the dark part taken by the second imaging unit.

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