公开(公告)号：US3630626A

公开(公告)日：1971-12-28

申请号：US3630626D

申请日：1970-07-09

Applicant: CAMECA

Inventor： ROUBEROL JEAN-MICHEL

IPC: G01J3/08 ,  G01J3/42 ,  G01N21/35 ,  G01N21/34

CPC classification number: G01J3/42

Abstract: In an infrared spectrometer with two channels preceded by a device for producing monochromatic radiation and constituted by a collimator, a diffraction grating and a focusing element, the collimator can adopt two angular rest positions by pivoting about an axis perpendicular to the lines of the grating; in these two positions of the collimator, the focusing element directs a monochromatic beam whose wavelength depends solely upon the position of the grating, either onto a first slot or onto a second slot, those slots being respectively coupled to the two channels.

公开(公告)号：FR2644930A1

公开(公告)日：1990-09-28

申请号：FR8903674

申请日：1989-03-21

Applicant: CAMECA

Inventor： ROUBEROL JEAN-MICHEL ,  TONG MATHIAS

IPC: H01J37/141

Abstract: The lens is formed by the association of two electromagnetic lenses sharing one and the same magnetic circuit crossed by one and the same central channel. The first lens is a shielded lens and has an annular gap at one of its ends. This annular gap cuts the central channel along a direction the plane of which is perpendicular to the optical axis. The second lens is a single-pole lens surrounding the annular gap of the first lens. It has an annular gap demarcated by two lips, the walls of which have shapes generated by revolution around the optical axis. Induction coils enable the magnetic flux of the gaps to be made to vary.

公开(公告)号：FR2584234A1

公开(公告)日：1987-01-02

申请号：FR8509893

申请日：1985-06-28

Applicant: CAMECA

Inventor： BEAUREGARD FRANCOIS COSTA DE ,  ROUBEROL JEAN-MICHEL

IPC: H01L21/66 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/302 ,  G01R31/305 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28 ,  H01J37/256

Abstract: An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit to be tested. It also includes an accelerator of the secondary electrons emitted by the integrated circuit in a direction colinear and opposite that of the primary electron beam, a separator with three pole pieces for directing out of the column the beam of secondary electrons accelerated by the accelerator and an energy spectrometer coupled to the separator and fixed to the outside of the column for analyzing, depending on their energy, the electrons of the beam of secondary electrons emitted separately by the separator.

公开(公告)号：FR2584234B1

公开(公告)日：1988-12-09

申请号：FR8509893

申请日：1985-06-28

Applicant: CAMECA

Inventor： BEAUREGARD FRANCOIS COSTA DE ,  ROUBEROL JEAN-MICHEL

IPC: H01L21/66 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/302 ,  G01R31/305 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28 ,  H01J37/256

Abstract: An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit to be tested. It also includes an accelerator of the secondary electrons emitted by the integrated circuit in a direction colinear and opposite that of the primary electron beam, a separator with three pole pieces for directing out of the column the beam of secondary electrons accelerated by the accelerator and an energy spectrometer coupled to the separator and fixed to the outside of the column for analyzing, depending on their energy, the electrons of the beam of secondary electrons emitted separately by the separator.