公开(公告)号：JPS6228597A

公开(公告)日：1987-02-06

申请号：JP16581485

申请日：1985-07-29

Applicant: CANON KK

Inventor： HITOTSUBASHI HIROO ,  OZAWA MASAKAZU ,  EBINA RYUICHI ,  SAITO ATSUSHI

IPC: F16L55/02

公开(公告)号：JPS6227152A

公开(公告)日：1987-02-05

申请号：JP16581385

申请日：1985-07-29

Applicant: CANON KK

Inventor： HITOTSUBASHI HIROO ,  OZAWA MASAKAZU ,  EBINA RYUICHI ,  SAITO ATSUSHI

IPC: B41J2/17 ,  B41J2/175

Abstract: PURPOSE:To achieve the cost down by molding all the containers with one kind of metal mold and at the same time, to prevent the occurrence of mistakes such as an error in the selection container or the like, by a method wherein although molded into thoroughly the same shape, the container is so constructed as to provide multiple parts capable of being cut off to part thereof. CONSTITUTION:A container 1 is molded under a state in which notch parts 7-10 and opening parts 11-14 are formed on part of peripheral wall 3 and with the same kind of metal mold. All the parts 15-18 capable of being cut off remain when they are in a molded state. A pair of cutters 19, 19 are provided according to the color of ink among the parts 15-18 capable of being cut off on the ink filler side, and only by installing the container 1, a specific part capable of being cut off is cut off. A projection 20 is protoruded on the apparatus side corresponding to the cut off part of the container for which filling has been completed. Therefore, unless a specific projection 20 corresponds to a specific notch part being cut off, the container 1 can not throughly 50 mounted because one of the remainding parts 15-18 prevents the mounting.

公开(公告)号：JPH0449613A

公开(公告)日：1992-02-19

申请号：JP15869290

申请日：1990-06-19

Applicant: CANON KK

Inventor： EBINA RYUICHI

IPC: G03F7/20 ,  H01L21/027 ,  H05G2/00

Abstract: PURPOSE:To enable protection of a synchrotron radiation apparatus when a leak occurs, without causing a damage in a window material, by controlling operations of opening and closing a shut-off valve, a communication valve and a pump valve in accordance with pressures detected by first to third pressure detecting means. CONSTITUTION:When a pressure detected by a pressure sensor 115A provided in an exposure chamber 119A exceeds a prescribed pressure PO due to a failure in load lock in a wafer preliminary chamber 117A or a mask preliminary chamber 123A or a failure in adjustment of the pressure in the exposure chamber 119A or the like, an emergency shut-off valve 103A, shut-off valves 108A and 126A and a pump valve 109A are put in closed states together and, in succession, a communication valve 111A is put in an opened state. When any one of pressures P1 to P4 detected by pressure sensors 102A, 106A, 107A and 13A provided between a synchrotron radiation apparatus and a window material 114A exceeds a prescribed pressure set beforehand, the emergency shut-off valve 103A and the shut-off valves 108A and 126A are put in the closed states and then it is checked up which pressure sensor shows a rising detected pressure.