公开(公告)号：DE69927631D1

公开(公告)日：2005-11-17

申请号：DE69927631

申请日：1999-03-26

Applicant: CANON KK

Inventor： AOKI SHUJI ,  IMAI SHUNZO

IPC: H01L21/02 ,  H02H1/06 ,  H02J9/06

Abstract: A fabrication apparatus including an emergency stop circuit which is an emergency stop switch has a first electromagnetic switch for supplying and shutting off power to the apparatus and a second electromagnetic switch for controlling power supply to an electromagnetic coil of the first electromagnetic switch. Power is supplied to the electromagnetic coil of the first electromagnetic switch from the primary side of the first electromagnetic switch via a contact of the second electromagnetic switch. An uninterruptible power source supplies power to an electromagnetic coil of the second electromagnetic switch via the emergency stop circuit. This emergency stop switch is inserted midway along a power line to the electromagnetic coil of the second electromagnetic switch. This allows safe emergency stop of the fabrication apparatus for semiconductors and the like. When the operation of the fabrication apparatus stops due to stoppage of power, the apparatus is automatically reactivated after the power is recovered. This increases the productivity.

公开(公告)号：DE69927631T2

公开(公告)日：2006-06-22

申请号：DE69927631

申请日：1999-03-26

Applicant: CANON KK

Inventor： AOKI SHUJI ,  IMAI SHUNZO

IPC: H01L21/02 ,  H02J9/06 ,  H02H1/06

Abstract: A fabrication apparatus including an emergency stop circuit which is an emergency stop switch has a first electromagnetic switch for supplying and shutting off power to the apparatus and a second electromagnetic switch for controlling power supply to an electromagnetic coil of the first electromagnetic switch. Power is supplied to the electromagnetic coil of the first electromagnetic switch from the primary side of the first electromagnetic switch via a contact of the second electromagnetic switch. An uninterruptible power source supplies power to an electromagnetic coil of the second electromagnetic switch via the emergency stop circuit. This emergency stop switch is inserted midway along a power line to the electromagnetic coil of the second electromagnetic switch. This allows safe emergency stop of the fabrication apparatus for semiconductors and the like. When the operation of the fabrication apparatus stops due to stoppage of power, the apparatus is automatically reactivated after the power is recovered. This increases the productivity.

公开(公告)号：JP2002141278A

公开(公告)日：2002-05-17

申请号：JP2000338461

申请日：2000-11-07

Applicant: CANON KK

Inventor： IMAI SHUNZO

IPC: G03F7/20 ,  H01L21/027 ,  H02J9/00

Abstract: PROBLEM TO BE SOLVED: To realize an electric supply system with high safety which enable to start automatically, after power stoppage. SOLUTION: A power-supplying part 5 for supplying power to an air- conditioning system 3 of an exposure system manufacturing a device and the like, a light source device 13, a power source 6 of the body and other devices has a electromagnetic switch 14 for keeping the closed status by being supplied auxiliary power by an uninterruptible power source 10 during power stoppage. Power-supplying part 5 stops all power supply by operations of a connecting terminal 19, that is opened by emergency shutdown switches 18a, 18b or an over-temperature detector of air conditioning system 3 during an emergency. During power stoppage, connection terminal 19 of an emergency shutdown circuit is kept inoperative for a certain period of time, by cooling the over- temperature detector and to prepare for an automatic start up in case of power recovery in short time.

公开(公告)号：JPH11219898A

公开(公告)日：1999-08-10

申请号：JP3389998

申请日：1998-01-30

Applicant: CANON KK

Inventor： IMAI SHUNZO

IPC: F16K17/04 ,  H01L21/02 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To obtain a drainage unit capable of preventing the contamination of the inside of a chamber, such as clean room, etc., with the outside air by surely preventing the flow of the outside air in the chamber via a drainage pipe for a semiconductor manufacturing apparatus, provided with the drainage unit which discharges dew drops condensed in the chamber. SOLUTION: In a drainage pipe 4 through which dew drops condensed in a chamber 5 which houses an aligner, etc., are discharged to the outside through a drain pan 7, a check valve 1 constituted of a pedestal 2 which is fixed to the internal surface of the pipe 4 and has a valve hole 2a at its central part and a valve disc 3, which is journaled by the pedestal 2 in a swingable state and normally tightly adhered to the lower surface of the pedestal 2 by the urging force of a spring is positioned. When water (w) staying on the valve disc 3 reaches a prescribed amount, the disc 3 turns against the urging force of the spring and the check valve 1 opens, resulting in the automatic discharge of the water (w). When water no longer stays in the drainage pipe 4 due to the intermittent occurrence of dew condensation, evaporation of water, etc., the drainage pipe 4 is blocked and the flowing of the outside air in the pipe is surely prevented, by having the valve 1 closed.

公开(公告)号：JPH0525166B2

公开(公告)日：1993-04-12

申请号：JP17760784

申请日：1984-08-28

Applicant: CANON KK

Inventor： IMAI SHUNZO

IPC: B65G1/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/677

公开(公告)号：JPS62161607A

公开(公告)日：1987-07-17

申请号：JP66886

申请日：1986-01-08

Applicant: CANON KK

Inventor： OMORI TARO ,  IMAI SHUNZO ,  SATO TERUYA

IPC: H01L21/677 ,  B65G1/00 ,  B65G1/04 ,  B65H7/14 ,  H01L21/67 ,  H01L21/68

Abstract: PURPOSE:To miniaturize a device and enable inserting and removing at an optional place by forming a pantograph type hand, with a pair of extendible arms which have a finger on their ends and liftably up and down, on a straight advancing type hand for inserting and removing a wafer into and from a housing box. CONSTITUTION:The whole unit is lifted up and down by means of an unshown lifting device, and is set to a proper position for inserting a finger 1 by means of a half mirror 23, laser rays 20, and a photo-diode 24. Then by driving an arm extension/contraction driving part 27, arms 5a, 5b are rotated clockwise via shafts 4a, 4b and gears 28a, 28b. Thereby, timing belts 10a, 10b, and timing pulleys 11a, 11b are rotated counterclockwise, arms 7a, 7b are rotated counterclockwise, and the finger 1 is advanced into a cassette 2. Then, the whole unit is lifted up, raising the finger 1 to hold a wafer. And, then, the finger 1 is retracted by a reverse procedure. Thereby, it is possible to insert and remove the finger 1 at an optional place.

公开(公告)号：JPS62106641A

公开(公告)日：1987-05-18

申请号：JP24625585

申请日：1985-11-05

Applicant: CANON KK

Inventor： IMAI SHUNZO

IPC: H01L21/67 ,  B65G1/00 ,  B65G1/07 ,  H01L21/68

Abstract: PURPOSE:To lower probabilities for a wafer to be damaged by a method wherein a sensor capable of detecting if a wafer is out of a cassette insertion/ extraction opening is provided for the accomplishment of aligning only when a wafer is out of the opening. CONSTITUTION:A beam 18 emitted by a sensor 16 at the light-emitting side is received by a sensor 17 on the light-receiving side. A wafer 4 out of a wafer cassette 5 stops the beam 18. This causes a pusher 15 to go into operation, which in turn causes a mount 6, push-up platform 13, and eccentric cam 7 to go into motion for the rotation of the wafer cassette 5 around shaft support members 9 and 14. As the result, the wafer cassette 5 is inclined with its wafer insertion/extraction opening up. A motor drives the eccentric cam 7 and the wafer cassette 5 is thrown into a rocking motion for the alignment of wafers 4 in the wafer cassette 5. A spring 8 expands and contracts in response to the eccentric cam 7 in rotation, pushing a mount 6 against the eccentric cam 7. After the rocking, the wafer cassette 5 is allowed to return to its original attitude.

公开(公告)号：JPS6214434A

公开(公告)日：1987-01-23

申请号：JP15237385

申请日：1985-07-12

Applicant: CANON KK

Inventor： DEGUCHI SHINKICHI ,  IMAI SHUNZO ,  SATO TERUYA

IPC: H01L21/683 ,  B23Q3/06 ,  H01L21/66

Abstract: PURPOSE:To easily carry in or carry out wafers without complicating the internal structure of a wafer chuck by a method wherein the lifting mechanism is separated into the wafer-lifting member and the lift-driving means. CONSTITUTION:The lifting mechanism is separated into a wafer-lifting member and a lift-driving means B, which moves the member A up and down. The lifting member (the base side part A consisting of a fork 5 and energizing springs 9) is mounted to a base 3 which is the wafer 1 mount used as the wafer chuck, and the lift-driving means (the driving means B consisting of thrusting-up pins 10, a bearing 11, a V roller 13 and a helicoid spring 14) is mounted on the side of a stage 12 supporting the base. By this constitution, the lift-driving source can be provided outside the wafer chuck or the vertically moving mechanism of the wafer chuck itself can be commonly used as the lift-driving source.

公开(公告)号：JPS628933A

公开(公告)日：1987-01-16

申请号：JP14661385

申请日：1985-07-05

Applicant: CANON KK

Inventor： IMAI SHUNZO ,  SATO TERUYA

IPC: B65H9/00 ,  B65G1/00 ,  B65G1/04 ,  B65H3/32 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68

Abstract: PURPOSE:To make it possible to transfer a wafer always with a high degree of accuracy, by providing a member for aligning a wafer which is stored shifted from a predetermined position, at the latter, to a hand for taking out a wafer from the inside of a cassette. CONSTITUTION:Before a wafer 3 is taken out of a cassette 2, an elevating device 18 moves the entire unit up and down to set the same at a position appropriate for inserting a finger 1 into the cassette. During the above-mentioned step, a photodiode 14 detects a laser beam 15 which is reflected upon a mirror and received through a half mirror 12. Then, a drive section 16 drives a shaft 4, and a shaft 6 is rotated by a rotating angle two time as large as that of the shaft 4 in the direction opposite to the direction of rotation of the shaft 4 in order to rotate arms 5, 7 in opposite directions by an equal angle. Thereby, a hand is expanded to allow the finger 11 to enter into the cassette 2. At this time if a wafer 2 projects out of the cassette 2, a block member 19 attached on the finger 1 pushes the wafer 3 to a predetermined position in the cassette 2.

公开(公告)号：JPH09189965A

公开(公告)日：1997-07-22

申请号：JP1938296

申请日：1996-01-10

Applicant: CANON KK

Inventor： IMAI SHUNZO

IPC: G03B21/14 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To enhance printing amount per hour, that is, throughput by driving and controlling a substrate by operation from the outside and selecting a desired diaphragm. SOLUTION: An operator sets the desired diaphragm by an external keyboard 29, whereby a driving system 6 is controlled to drive a 1st diaphragm mechanism. The driving system 6 is connected to a computer 21 through a cable 20, and a driving system 16 is connected to a computer 21 through a cable 22. Furthermore, the keyboard 214 and the computer 21 are connected through a cable 23, and the operator inputs a signal concerning the kind(reticle number and the value of line width) of a reticle 12 is inputted in the computer 21 through the signal conductor of the cable 23 by the key 25 of the keyboard 24. The computer 21 decides any diaphragm of a disk in accordance with the signal, and the diameter of the aperture part of a 2nd diaphragm mechanism 15 is decided by the driving part 16 in accordance with the decided result.