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公开(公告)号：ES2116478T3
公开(公告)日：1998-07-16
申请号：ES94101556
申请日：1994-02-02
Applicant: CANON KK
Inventor： OKUMA NORIO , MIYAGAWA MASASHI , INADA GENJI , TOSHIMA HIROAKI , SATO TAMAKI
IPC: B41J2/16
Abstract: A method of manufacturing an ink jet recording head, having the steps of (1) forming an ink flow path pattern on a substrate with the use of a dissoluble resin, the substrate having ink ejection pressure generating elements thereon, (2) forming on the ink flow path pattern a coating resin layer, which will serve as ink flow path walls, by dissolving in a solvent a coating resin containing an epoxy resin which is solid at ordinary temperatures, and then solvent-coating the solution on the ink flow path pattern, (3) forming ink ejection outlets in the coating resin layer above the ink ejection pressure generating elements, and (4) dissolving the ink flow path pattern.
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公开(公告)号：AT166836T
公开(公告)日：1998-06-15
申请号：AT94101556
申请日：1994-02-02
Applicant: CANON KK
Inventor： OKUMA NORIO , MIYAGAWA MASASHI , INADA GENJI , TOSHIMA HIROAKI , SATO TAMAKI
IPC: B41J2/16
Abstract: A method of manufacturing an ink jet recording head, having the steps of (1) forming an ink flow path pattern on a substrate with the use of a dissoluble resin, the substrate having ink ejection pressure generating elements thereon, (2) forming on the ink flow path pattern a coating resin layer, which will serve as ink flow path walls, by dissolving in a solvent a coating resin containing an epoxy resin which is solid at ordinary temperatures, and then solvent-coating the solution on the ink flow path pattern, (3) forming ink ejection outlets in the coating resin layer above the ink ejection pressure generating elements, and (4) dissolving the ink flow path pattern.
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公开(公告)号：DE69410648T2
公开(公告)日：1998-12-10
申请号：DE69410648
申请日：1994-02-02
Applicant: CANON KK
Inventor： OKUMA NORIO , MIYAGAWA MASASHI , INADA GENJI , TOSHIMA HIROAKI , SATO TAMAKI
IPC: B41J2/16
Abstract: A method of manufacturing an ink jet recording head, having the steps of (1) forming an ink flow path pattern on a substrate with the use of a dissoluble resin, the substrate having ink ejection pressure generating elements thereon, (2) forming on the ink flow path pattern a coating resin layer, which will serve as ink flow path walls, by dissolving in a solvent a coating resin containing an epoxy resin which is solid at ordinary temperatures, and then solvent-coating the solution on the ink flow path pattern, (3) forming ink ejection outlets in the coating resin layer above the ink ejection pressure generating elements, and (4) dissolving the ink flow path pattern.
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公开(公告)号：DE69410648D1
公开(公告)日：1998-07-09
申请号：DE69410648
申请日：1994-02-02
Applicant: CANON KK
Inventor： OKUMA NORIO , MIYAGAWA MASASHI , INADA GENJI , TOSHIMA HIROAKI , SATO TAMAKI
IPC: B41J2/16
Abstract: A method of manufacturing an ink jet recording head, having the steps of (1) forming an ink flow path pattern on a substrate with the use of a dissoluble resin, the substrate having ink ejection pressure generating elements thereon, (2) forming on the ink flow path pattern a coating resin layer, which will serve as ink flow path walls, by dissolving in a solvent a coating resin containing an epoxy resin which is solid at ordinary temperatures, and then solvent-coating the solution on the ink flow path pattern, (3) forming ink ejection outlets in the coating resin layer above the ink ejection pressure generating elements, and (4) dissolving the ink flow path pattern.
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公开(公告)号：JP2001010070A
公开(公告)日：2001-01-16
申请号：JP16205499
申请日：1999-06-09
Applicant: CANON KK
Inventor： KOBAYASHI JUNICHI , MURAKAMI KEIICHI , SATO KANKI , OKUMA NORIO
Abstract: PROBLEM TO BE SOLVED: To perform highly reliable etching by employing a polyetheramid resin layer as an etching resistant mask. SOLUTION: Using the face of an Si substrate as an etching start face, a thermoplastic polyetheramid (TPEA) resin layer 3 is formed by spin coating. On the other hand, a resist pattern is formed using photoresist and an etching mask is formed by etching the TPEA. The TPEA is etched by dry etching using a reaction gas, i.e., RIE(reactive ion etching) using O2 gas, or plasma ashing. Subsequently, the photoresist is stripped and a supply opening 4 is formed by anisotropic etching using the TPEA resin film 3 as a mask. For example, TMAH 22 wt.% is etched at a treating temperature of 80 deg.C and an etching rate of 30-40 μm/h.
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Patent Agency Ranking
公开(公告)号：JPH11348290A
公开(公告)日：1999-12-21
申请号：JP15439198
申请日：1998-06-03
Applicant: CANON KK
Inventor： OKUMA NORIO , TERUI MAKOTO
Abstract: PROBLEM TO BE SOLVED: To provide an ink jet head having high reliability by a constitution wherein an adhering force between a substrate having an ink ejection pressure generating element formed thereon and a liquid forming member is enhanced. SOLUTION: This ink jet head comprises an ejection nozzle 9 for ejecting ink, a liquid passage which is communicated to the ejection nozzle 9 and includes an ink ejection pressure generating element 2, a substrate 1 having the ink ejection pressure generating element 2 formed thereon and a liquid passage-forming member 8 which forms a liquid passage by being bonded to the substrate 1. The liquid passage-forming member 8 is bonded to the substrate 1 with an adhering layer made from a polyether amide resin therebetween.
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公开(公告)号：JPH09187944A
公开(公告)日：1997-07-22
申请号：JP184996
申请日：1996-01-10
Applicant: CANON KK
Inventor： OKUMA NORIO
Abstract: PROBLEM TO BE SOLVED: To control the emitting directionality of ink droplets by inclining the wall surface of a foaming chamber formed of a resin layer so as to cross the surface of a substrate at an acute angle. SOLUTION: An ink emitting pressure generating element 2 and an ink supply port are formed on a silicon substrate 1. An electrode for inputting a control signal for element operation is connected to the element 2. A positive resist is formed on the substrate as a meltable resin layer to be exposed through a mask. Over exposure is performed in the optimum exposure quantity or more and developing treatment is performed to make it possible to form a pattern having an inclined structure and an angle of inclination is adjusted by over exposure quantity. A coating resin layer and an ink emitting orifice are formed on the resin layer and the meltable resin layer is eluted to complete an ink jet head. By this constitution, the emitting directionality of ink droplets can be improved.
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公开(公告)号：JPH08142339A
公开(公告)日：1996-06-04
申请号：JP30701094
申请日：1994-11-16
Applicant: CANON KK
Inventor： TOSHIMA HIROAKI , MIYAGAWA MASASHI , OKUMA NORIO
Abstract: PURPOSE: To inexpensively form the liquid jet recording head of an ink jet recording apparatus by a reduced number of processes by simultaneously forming an ink passage, a liquid chamber and an ink emitting orifice in a process eluting a soluble resin. CONSTITUTION: A soluble resin is applied to the parts becoming ink passages and liquid chambers of a substrate 1 in which ink supply holes 5 are bored to form first patterns by photolithography. Second patterns 3 are formed on the parts becoming ink emitting orifices of the substrate 1 having the first patterns formed thereon. At this time, it is important to set the thickness of the second patterns 3 to at least 1.5 times or more the thickness of the film 42 forming the main structure of a head. Finally, by removing the first and second patterns due to the soluble resin, a liquid jet recording head having three fundamental structures of the liquid jet recording head being ink passages, liquid chambers and ink emitting orifices formed thereto simultaneously is completed.
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公开(公告)号：JPH08142327A
公开(公告)日：1996-06-04
申请号：JP30685494
申请日：1994-11-16
Applicant: CANON KK
Inventor： MIYAGAWA MASASHI , TOSHIMA HIROAKI , OKUMA NORIO
IPC: B41J2/05
Abstract: PURPOSE: To relax stress generated on a bonding portion of a substrate of a record head by a constitution wherein a groove is formed on at least one of a heating resistor substrate and a forming layer of a liquid passage/liquid ejection nozzle, preferably on the forming layer of the liquid passage/liquid ejection nozzle. CONSTITUTION: In order to relax stress generated in a direction perpendicular to an arraignment of nozzles (liquid ejection direction), two longitudinal grooves 5a are provided. One (5b) is on an upper section of an ink ejection nozzle in a direction parallel to the arraignment of nozzles and the other is in front of a wire-bonding pad. In order to relax stress generated in a direction of the arraignment of nozzles, two grooves 5c are provided such that an ink chamber is divided in a direction perpendicular to the arraignment of nozzles. In the aforementioned structure, it is possible to suppress warpage of a substrate 1 even when an area of the substrate of a liquid ejection record head is great. It is possible to reduce the level of the warpage of the substrate due to the difference between coefficients of thermal expansion even in the liquid ejection record head particularly having a multiple number of nozzles.
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公开(公告)号：JPH07178924A
公开(公告)日：1995-07-18
申请号：JP32495793
申请日：1993-12-22
Applicant: CANON KK
Inventor： DOI TAKESHI , MURAKAMI SHUICHI , OKUMA NORIO , KOMURO HIROKAZU , YOKOI HIDETO , FUJIKAWA TAKASHI
Abstract: PURPOSE:To keep a proper recording state while minimizing the amt. of waste ink and the lowering of recording speed due to the interruption of recording operation by providing a plurality of electrodes at every ink supply passage and detecting the conductivity of the ink between the electrodes. CONSTITUTION:When a power supply is turned ON or a recording operation start signal is inputted, a conductivity measuring device 41 detects the conductivity of ink by the detection electrodes 40a, 40b of respective passages. The proper conductivity (k) of ink, the tolerant proper conductivity level kg of ink, the upper limit value k0 of the conductivity of ink enabling the proper emission of ink and the upper limit value k1 of the conductivity of ink emitting ink but taking an unstable state are set to a judging device 4. It is judged that the ink of a passage wherein the detected conductivity of ink is k0 or less can be properly emitted and the ink of a passage of k0-k1 is unstable but can be emitted and the ink of a passage of k1 or more is impossible to emit to control a recording head driving circuit 44 to control a recording head 1.
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