公开(公告)号：DE69226817D1

公开(公告)日：1998-10-08

申请号：DE69226817

申请日：1992-06-09

Applicant: CANON KK

Inventor： SUZUKI YOSHIO ,  HIRAI YUTAKA ,  TAKAMATSU OSAMU ,  NAKAYAMA MASARU ,  YAGI TAKAYUKI ,  KASANUKI YUJI ,  YAMAMOTO KEISUKE ,  SHIMADA YASUHIRO

IPC: G01B21/30 ,  B81B3/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L41/09 ,  G01B7/34

公开(公告)号：AT165187T

公开(公告)日：1998-05-15

申请号：AT94308260

申请日：1994-11-09

Applicant: CANON KK

Inventor： KASANUKI YUJI ,  TAKAMATSU OSAMU ,  KANEKO TETSUYA ,  NIIBE MASAHITO ,  HASEGAWA MITSUTOSHI ,  SUZUKI HIDETOSHI

IPC: H01J1/316 ,  H01J29/74 ,  H01J31/12 ,  H01J29/70

公开(公告)号：AU2012497A

公开(公告)日：1997-07-10

申请号：AU2012497

申请日：1997-05-08

Applicant: CANON KK

Inventor： KASANUKI YUJI ,  TAKAMATSU OSAMU ,  KANEKO TETSUYA ,  NIIBE MASAHITO ,  HASEGAWA MITSUTOSHI

IPC: H01J31/10

公开(公告)号：DE69216284T2

公开(公告)日：1997-05-15

申请号：DE69216284

申请日：1992-04-21

Applicant: CANON KK

Inventor： TAKAMATSU OSAMU ,  HIRAI YUTAKA ,  NAKAYAMA MASARU ,  YAGI TAKAYUKI ,  KASANUKI YUJI ,  SHIMADA YASUHIRO

IPC: G01Q10/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on respective sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does. A scanning tunneling microscopy comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.

公开(公告)号：DE69121868T2

公开(公告)日：1997-02-06

申请号：DE69121868

申请日：1991-12-13

Applicant: CANON KK

Inventor： YAGI TAKAYUKI ,  HIRAI YUTAKA ,  TAKAMATSU OSAMU ,  NAKAYAMA MASARU ,  KASANUKI YUJI ,  YAMAMOTO KEISUKE ,  SHIMADA YASUHIRO ,  SUZUKI YOSHIO

IPC: B81B3/00 ,  G01N27/00 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q60/00 ,  G01Q60/16 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L21/66 ,  H01L41/09 ,  H01L41/22 ,  G01B7/34

Abstract: A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.

公开(公告)号：CA2070946C

公开(公告)日：1996-11-26

申请号：CA2070946

申请日：1992-06-10

Applicant: CANON KK

Inventor： SUZUKI YOSHIO ,  HIRAI YUTAKA ,  TAKAMATSU OSAMU ,  NAKAYAMA MASARU ,  YAGI TAKAYUKI ,  KASANUKI YUJI ,  YAMAMOTO KEISUKE ,  SHIMADA YASUHIRO

IPC: G01B21/30 ,  B81B3/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L41/09

Abstract: A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a combshaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.

公开(公告)号：CA2066478A1

公开(公告)日：1992-10-23

申请号：CA2066478

申请日：1992-04-21

Applicant: CANON KK

Inventor： TAKAMATSU OSAMU ,  HIRAI YUTAKA ,  NAKAYAMA MASARU ,  YAGI TAKAYUKI ,  KASANUKI YUJI ,  SHIMADA YASUHIRO

IPC: G01Q10/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on respective sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does. A scanning tunneling microscopy comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.

公开(公告)号：DE69409617D1

公开(公告)日：1998-05-20

申请号：DE69409617

申请日：1994-11-09

Applicant: CANON KK

Inventor： KASANUKI YUJI ,  TAKAMATSU OSAMU ,  KANEKO TETSUYA ,  NIIBE MASAHITO ,  HASEGAWA MITSUTOSHI ,  SUZUKI HIDETOSHI

IPC: H01J1/316 ,  H01J29/74 ,  H01J31/12 ,  H01J29/70

公开(公告)号：DE69223211T2

公开(公告)日：1998-04-16

申请号：DE69223211

申请日：1992-09-30

Applicant: CANON KK

Inventor： NAKAYAMA MASARU ,  TAKAMATSU OSAMU ,  YAGI TAKAYUKI ,  YAMAMOTO KEISUKE ,  KAWASAKI TAKEHIKO ,  SHIMADA YASUHIRO ,  SUZUKI YOSHIO

IPC: G01B7/34 ,  B81B3/00 ,  B81B7/02 ,  B81C1/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/06 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G05D3/00 ,  G11B5/48 ,  G11B9/00 ,  G11B9/14 ,  H01L27/20 ,  H01L29/84 ,  G01N27/00

Abstract: A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.

公开(公告)号：DE69216284D1

公开(公告)日：1997-02-13

申请号：DE69216284

申请日：1992-04-21

Applicant: CANON KK

Inventor： TAKAMATSU OSAMU ,  HIRAI YUTAKA ,  NAKAYAMA MASARU ,  YAGI TAKAYUKI ,  KASANUKI YUJI ,  SHIMADA YASUHIRO

IPC: G01Q10/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on respective sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on respective surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer are more protruded out than each end of the second and third electrode layers does. A scanning tunneling microscopy comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.