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公开(公告)号：JP2001325026A
公开(公告)日：2001-11-22
申请号：JP2000140708
申请日：2000-05-12
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To maintain high accuracy of origin position, without generating the fluctuation of a stop position. SOLUTION: A mobile stage 34 is moved into the direction of a machine origin sensor at a first prescribed speed by using a machine origin sensor 32 and a control circuit 29, which controls an origin signal 33 outputted from the machine origin sensor, and an incremental type position detector 37 is zero- reset according to a signal 30 synchronizing with an origin signal 33 outputted when the mobile stage 34 passes the machine origin sensor 32, and the mobile stage 34 is made to move by a prescribed distance to a position away from the machine origin sensor 32, and the mobile stage 34 is moved into the direction of the machine origin sensor again at a second prescribed speed, and the position detector 37 is zero-reset according to the signal 30 synchronizing with the origin signal 33 outputted, when the mobile stage passes the machine origin sensor 32. Then, the zero position of the position detector 37 obtained from the sequence operation is defined as an origin.
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公开(公告)号：JPH10141374A
公开(公告)日：1998-05-26
申请号：JP31019496
申请日：1996-11-06
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To detect the displacement of a movable base by the change of electrostatic capacity of a bearing clearance. SOLUTION: A bearing pad 2 is formed of conductive material and held to a movable base 1 through an actuator 4 such as a laminated piezoelectric element. An oscillator 14 is connected to an electrode 2b on the bearing pad 2 to apply high frequency voltage between the bearing pad 2 and a guide face 5a, and the change of electrostatic capacity generated in association with the dimensional change of a bearing clearance is detected by a wave detector 15 and fed back to a control device 10 of the actuator 4. An expensive displacement sensor is omitted to contribute to the decrease of parts cost and the like and the miniaturization of a device.
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公开(公告)号：JP2002066875A
公开(公告)日：2002-03-05
申请号：JP2000254777
申请日：2000-08-25
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
IPC: B23Q15/013 , B23C3/16 , G05B19/404
Abstract: PROBLEM TO BE SOLVED: To improve precision of three-dimensional machining by NC control. SOLUTION: By controlling a relative position between a bite 8 revolved through rotation of a main spindle 7 and a work W by a three-axis table device consisting of X Y Z tables 4-6, a three-dimensional shape is formed in the work W. When rotation precision of the main spindle 7 is low, since an error occurs as a result of a tip 8a of the bite 8 being dislocated from a target revolution locus, displacement from the target revolution locus of the bite 8 is predicted by a pre-measured main spindle rotation precision data group 104 and a positioning command for X Y Z tables 4-6 is corrected.
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公开(公告)号：JPH07305724A
公开(公告)日：1995-11-21
申请号：JP11975994
申请日：1994-05-10
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
IPC: B23Q15/24 , F16C32/06 , H01L21/027 , H01L21/677 , H01L21/68
Abstract: PURPOSE:To improve the stability of a control system by outputting the actuator displacing signal for moving an actuator in relation to a hydrostatic bearing and a movable load unit in the bearing clearance direction, and outputting the output signal to a hydrostatic bearing based on the command signal to the actuator, and performing the feedback of the displacement and the output signal so as to control the actuator. CONSTITUTION:A target value 501 is converted to a deviation from a result of a displacement sensor 106 by a subtraction unit 502, and the displacement signal is given as a command to a driving device 505. The driving device 505 displaces a piezoelectric element 104 on the basis of the command, and detects the displacement Ys with the displacement sensor 106, and performs the feedback of the displacement to the subtraction unit 502. Displacement Ys can be thereby decided by the piezoelectric element 104 on the basis of the target value. In the case where the external force is applied to the movable load unit 105, an external force estimating unit 510 estimates the displacement quantity Ys of the piezoelectric element 104 with a mathematical expression model unit 511 on the basis of the command signal given to the driving device 505, and when the feedback of the estimating signal to a control system is performed, the piezoelectric element 104 drives a hydrostatic bearing. With this structure, the control system can be easily stabilized.
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公开(公告)号：JPS63209186A
公开(公告)日：1988-08-30
申请号：JP4151687
申请日：1987-02-26
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI , HIGOMURA MAKOTO
IPC: H01L41/09 , H01L41/04 , H01L41/083
Abstract: PURPOSE:To remove the hysteresis characteristics of a piezoelectric element and to contrive to be able to obtain a linear displacement to a command signal by a method wherein a piezoelectric element of the same kind as the above piezoelectric element is connected in series with the above piezoelectric element to detect the amount of charge of the above piezoelectric element and the voltage of the latter piezoelectric element is feeded back. CONSTITUTION:The amount of charge of a piezoelectric element 1 is detected to obtain a feedback signal. As a detecting means for the amount of charge, a piezoelectric element 2 of the same kind as the element 1 is used in series connection, for example, with the element 1 and the detected signal is feeded back by a high input impedance amplifier. Accordingly, the amounts of charge of the element 1 for an actuator and the element 2 for detection become equal to each other and when the voltage of the element 2 is feeded back, the feedback signal to correspond to the amount of charge of the element 1 can be obtained. Moreover, when the voltage of the element 2 is feeded back through a high input impedance amplifier 4, the hysteresis of the element 1 is removed.
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Patent Agency Ranking
公开(公告)号：JPH10166212A
公开(公告)日：1998-06-23
申请号：JP33107596
申请日：1996-12-11
Applicant: CANON KK
Inventor： SAITO NORIHISA , TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To cut a work in a uniform mirror state with high surface finishing accuracy in order to obtain optical parts with curved surfaces of axial asymmetry from a molding die. SOLUTION: The mirror cutting device drives a cutting tool 2, the cutting part of which is rotationally driven at a position a radius R spaced away from the axis of a main spindle 1, back and forth in Z axis direction, and is provided with an X table 12 which is driven back and forth in Y axis direction at specified pitch by means of a Y stage 11, and which is driven back and forth in X axis direction along the radial direction of the axis of the spindle to control the inclination. In order to cut a set work W with a specified generating-line into a mirror with a specified roughness, triaxial control is performed.
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公开(公告)号：JP2003191140A
公开(公告)日：2003-07-08
申请号：JP2001392636
申请日：2001-12-25
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To provide a positioning device capable of enhancing bearing rigidity without making the device to a large size. SOLUTION: The positioning device positions a moving stage 102 supported by a fluid bearing 103 against a base 101 and is provided with a driving magnet 104 adding force so as to move the moving stage to a direction perpendicular to a pressure surface receiving a fluid pressure of the fluid bearing 103; a target member 107 integrally moved to a moving direction with the moving stage and relatively movably supported against the moving stage in the direction perpendicular to the pressure surface; and a detection sensor 106 for detecting a relative position in the direction perpendicular to the pressure surface of the moving stage and the target member. A bearing gap of the moving stage is controlled by adjusting generation force of the driving magnet based on a detection result of the detection sensor. COPYRIGHT: (C)2003,JPO
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公开(公告)号：JP2002149241A
公开(公告)日：2002-05-24
申请号：JP2000340860
申请日：2000-11-08
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To provide a positioning device which can position a translatory table with high precision even if a turntable has slight dynamic unbalance. SOLUTION: This device has repetitive compensators 122a, 122b, and 122c which compensate cyclic vibrations to the translatory table 109, a rotating speed decision unit 108 which decides the stability of the rotating speed of the turntable 101, a switch 123 which switches correction control signals by the repetitive compensators 122a, 122b, and 122c, and a means (composed of a feedback control system including linear motors 128a, 128b, 128c, and 128d, position detectors 118a, 118b, 118c, and 118d, subtractors 121a, 121b, and 121c, etc.), which controls the positioning of the translatory table 109 by outputting the correction control signals by the repetitive compensators 122a, 122b, and 122c by controlling the switch 123 through the rotating speed decision unit 108.
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公开(公告)号：JPH10144603A
公开(公告)日：1998-05-29
申请号：JP31882796
申请日：1996-11-14
Applicant: CANON KK
Inventor： TAKIZAWA NAOKI
Abstract: PROBLEM TO BE SOLVED: To provide a stage device which can prevent an excessive moment load from being applied to a hydrostatic bearing device which supports a wafer stage in non-contact. SOLUTION: A pair of linear motors for a wafer stage 3 are controlled by linear motor devices 11 and 12 respectively. Addition and subtraction values of outputs of a pair of displacement sensors 8 and 9 are fed back to the linear motor drives 11 and 12 through first and second controllers M1 and M2 to control a position and attitude of the stage 3. In the presence of a shape error such as a warpage in a guide of the state 3, the second controller M2 is put in its saturated state. The saturated state is detected by a saturation detector 25, so that a target angle signal P2 is updated.
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公开(公告)号：JPH08303464A
公开(公告)日：1996-11-19
申请号：JP11064795
申请日：1995-05-09
Applicant: CANON KK
Inventor： NONAKA YOSHIFUMI , TAKIZAWA NAOKI
Abstract: PURPOSE: To improve the holding stiffness of a rotor as well as to decrease the inclination error of an indexing shaft after indexing while maintaining the indexing precision. CONSTITUTION: In an indexing device provided with static pressure fluid bearings 3, 4 for restricting and supporting a rotor 1 in the radial direction and in the thrust direction in relation to a stator 2, and a control means 11 for controlling a rotational driving unit for rotating and driving the rotor in relation to the stator on the basis of the rotation angle detected by a rotation angle detector 10 for detecting the rotation angle of the rotor, a magnet 5 for applying preload for bringing the rotor into contact with the stator in the thrust direction between the rotor and the stator is provided. Independent fluid supplying circuits 7, 8 are respectively provided on the thrust bearing part and the radial bearing part of the static pressure fluid bearing, a fluid controller 6 for controlling supply of fluid to the thrust bearing part according to the command from the control means is provided on a fluid supplying circuit of the thrust bearing part, and the bearing surfaces of the rotor and the stator are brought in contact with each other after the indexing operation is completed.
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