公开(公告)号：WO2003102631A3

公开(公告)日：2003-12-11

申请号：PCT/US2003/016278

申请日：2003-05-21

Applicant: CAPELLA PHOTONICS, INC.

Inventor： VAN DRIEENHUIZEN, Bert, P. ,  WILDE, Jeffrey, P. ,  KUAN, Nelson

IPC: G02B7/182

Abstract: A MEMS apparatus (100) comprises a bulk element (110), first and second hinges (121, 122), and a support (130). The bulk element (110) has a top and a bottom surface (112, 111), and the hinges are disposed below the top surface (112).

公开(公告)号：WO2003102631A2

公开(公告)日：2003-12-11

申请号：PCT/US2003/016278

申请日：2003-05-21

Applicant: CAPELLA PHOTONICS, INC.

Inventor： VAN DRIEENHUIZEN, Bert, P. ,  WILDE, Jeffrey, P. ,  KUAN, Nelson

IPC: G02B

CPC classification number: G02B26/0841

Abstract: This invention provides method and apparatus for fabricating a MEMS apparatus having a bulk element with hinges underneath. The bulk element may comprise single-crystal silicon, fabricated by way of bulk micromachining techniques. The hinges may be made of thin-films, fabricated by way of surface micromachining techniques. A distinct feature of the MEMS apparatus of the present invention is that by disposing the hinges underneath the bulk element, the surface of the bulk element can be maximized and the entire surface becomes usable (e.g., for optical beam manipulation). Such a feature would be highly advantageous in making arrayed MEMS devices, such as an array of MEMS mirrors with a high optical fill factor. Further, by advantageously making use of both bulk and surface micromachining techniques, a MEMS mirror thus produced is equipped with a large and flat mirror along with flexible hinges, hence capable of achieving a substantial rotational range at modest electrostatic drive voltages.

Abstract translation: 本发明提供了一种用于制造MEMS器件的方法和装置，其具有在下面具有铰链的块体元件。 本体元件可以包括通过体微加工技术制造的单晶硅。 铰链可以由通过表面微加工技术制造的薄膜制成。 本发明的MEMS装置的一个显着特征在于，通过将铰链设置在体元件下方，可以使块体元件的表面最大化，并且整个表面变得可用（例如，用于光束操纵）。 这样的特征在制造阵列MEMS器件（例如具有高光学填充因子的MEMS反射镜的阵列）方面将是非常有利的。 此外，通过有利地利用本体和表面微加工技术，由此制造的MEMS反射镜与柔性铰链一起配备大型和平面镜，因此能够在适度的静电驱动电压下实现基本的旋转范围。