公开(公告)号：WO2013009609A1

公开(公告)日：2013-01-17

申请号：PCT/US2012/045733

申请日：2012-07-06

Applicant: CASCADE MICROTECH, INC. ,  CLEARY, Tim ,  HANAWAY, Peter ,  STRID, Eric ,  LESLIE, David ,  HILL, Eric ,  SMITH, Ken ,  GLEASON, K., Reed

Inventor： CLEARY, Tim ,  HANAWAY, Peter ,  STRID, Eric ,  LESLIE, David ,  HILL, Eric ,  SMITH, Ken ,  GLEASON, K., Reed

IPC: G01R31/02

CPC classification number: G01R31/2884 ,  G01R31/2887

Abstract: Systems, devices, and methods for two-sided testing of electronic devices. These systems, devices, and methods may include the use of a test fixture that is configured to electrically connect a back side electrical pad of a device under test with an auxiliary pad that faces in a different direction than the back side electrical pad. Additionally or alternatively, these systems, devices, and methods also may include the use of a probe head that is configured to form an electrical connection with both the auxiliary pad and a front side electrical pad of the device under test. The systems, devices, and methods also may include providing a test signal to the device under test, receiving a resultant signal from the device under test, and/or analyzing the resultant signal.

Abstract translation: 用于电子设备双面测试的系统，设备和方法。 这些系统，装置和方法可以包括使用测试夹具，其被配置为将被测器件的背面电焊盘与面向不同于背面电焊盘的方向的辅助焊盘电连接。 附加地或替代地，这些系统，装置和方法还可以包括使用探针头，其被配置成与被测设备的辅助焊盘和前侧电焊盘形成电连接。 系统，设备和方法还可以包括向被测设备提供测试信号，从被测设备接收结果信号和/或分析所得到的信号。

公开(公告)号：WO2018102259A1

公开(公告)日：2018-06-07

申请号：PCT/US2017/063305

申请日：2017-11-27

Applicant: CASCADE MICROTECH, INC.

Inventor： BOCK, Daniel Mark ,  CLEARY, Tim

IPC: G01R31/302 ,  G01R1/00 ,  G01R1/073

Abstract: Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test (DUT). A contact engine includes a flexible dielectric membrane having a first surface and a second surface and a plurality of probes supported by the flexible dielectric membrane. The plurality of probes are oriented to contact a plurality of contact locations on the DUT. Each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations. The contact engine further includes at least one membrane antenna supported by the flexible dielectric membrane. A probe head assembly includes the contact engine, A probe system includes the probe head assembly. Associated methods include methods of utilizing the contact engine.