公开(公告)号：WO2015134258A1

公开(公告)日：2015-09-11

申请号：PCT/US2015/017678

申请日：2015-02-26

Applicant: CASCADE MICROTECH, INC.

Inventor： INGRAM-GOBLE, Robbie ,  SIMMONS, Michael, E. ,  WOLF, Philip ,  GARRISON, Ryan ,  STORM, Christopher

IPC: H01L21/683

CPC classification number: H01L21/6838 ,  B25J11/0095 ,  B25J15/0014 ,  B25J15/0616 ,  H01L21/67778 ,  Y10S901/40

Abstract: Wafer-handling end effectors and semiconductor manufacturing devices that include and/or are utilized with wafer-handling end effectors are disclosed herein. The end effectors include an end effector body and a plurality of wafer-contacting surfaces that is supported by the end effector body and configured to form an at least partially face-to-face contact with a wafer. The end effectors further include a vacuum distribution manifold that extends between a robot-proximal end of the end effector body and the plurality of wafer-contacting surfaces. The end effectors also include a plurality of vacuum openings that is defined within the plurality of wafer-contacting surfaces and extends between the plurality of wafer-contacting surfaces and the vacuum distribution manifold. The end effectors further include a plurality of sealing structures each of which is associated with a respective one of the plurality of wafer-contacting surfaces.

Abstract translation: 本文公开了包括和/或与晶片处理端效应器一起使用的晶片处理末端执行器和半导体制造装置。 末端执行器包括末端执行器主体和多个晶片接触表面，其由端部执行器主体支撑并被配置为与晶片形成至少部分的面对面的接触。 末端执行器还包括在末端执行器主体的机器人近端与多个晶片接触表面之间延伸的真空分配歧管。 末端执行器还包括限定在多个晶片接触表面内并在多个晶片接触表面和真空分配歧管之间延伸的多个真空开口。 末端执行器还包括多个密封结构，每个密封结构与多个晶片接触表面中的相应一个相关联。

公开(公告)号：WO2017123397A1

公开(公告)日：2017-07-20

申请号：PCT/US2016/068121

申请日：2016-12-21

Applicant: CASCADE MICROTECH, INC.

Inventor： SIMMONS, Michael, E. ,  BOLT, Bryan, Conrad ,  STORM, Christopher, Anthony ,  NEGISHI, Kazuki ,  FRANKEL, Joseph, George ,  INGRAM-GOBLE, Robbie

IPC: G01R1/067 ,  G01R1/18 ,  G01R31/28

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

Abstract translation: 本文公开了屏蔽探针系统。 探针系统被配置为测试被测器件（DUT）并且包括至少部分地限定封闭体积的测量室，由测量室限定的孔，探测组件和屏蔽结构。 探测组件包括定向在封闭空间内的探针，可操作地连接到探针的探针臂和可操作地连接到探针臂的操纵器。 探测组件的至少一部分延伸穿过孔。 屏蔽结构在测量室和探测组件之间延伸，并被配置为限制流体流过孔并且将围绕测量室的周围环境中的封闭体积屏蔽，同时在整个过程中保持至少与探测臂的阈值间隔距离 探针臂的运动范围。

公开(公告)号：EP3403104A1

公开(公告)日：2018-11-21

申请号：EP16885426.3

申请日：2016-12-21

Applicant: Cascade Microtech, Inc.

Inventor： SIMMONS, Michael E. ,  BOLT, Bryan Conrad ,  STORM, Christopher Anthony ,  NEGISHI, Kazuki ,  FRANKEL, Joseph George ,  INGRAM-GOBLE, Robbie

IPC: G01R1/067 ,  G01R1/18 ,  G01R31/28

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.