公开(公告)号：WO2018063874A1

公开(公告)日：2018-04-05

申请号：PCT/US2017/052405

申请日：2017-09-20

Applicant: CASCADE MICROTECH, INC.

Inventor： FISHER, Gavin, Neil ,  THAERIGEN, Thomas, Reiner ,  MCCANN, Peter ,  JONES, Rodney ,  DUCKWORTH, Koby, L.

IPC: G01R1/067 ,  G01R31/28 ,  G01R1/073

Abstract: Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.

Abstract translation: 本文公开了探针系统和方法。 该方法包括直接测量第一操纵组件和第二操纵组件之间的距离，使第一和第二探针与第一和第二接触位置接触，向电气结构提供测试信号，并接收来自电气结构的合成信号。 该方法还包括基于距离表征探针系统和电气结构中的至少一个。 在一个实施例中，探测系统包括配置为直接测量第一操纵组件和第二操纵组件之间的距离的测量装置。 在另一个实施例中，探针系统包括探针头组件，该探针头组件包括台板，可操作地连接到台板的操纵器，可操作地连接到操纵器的矢量网络分析仪（VNA）延伸器以及可操作地连接到VNA延伸器的探针。 p>