公开(公告)号：WO2017172917A1

公开(公告)日：2017-10-05

申请号：PCT/US2017/024748

申请日：2017-03-29

Applicant: CASCADE MICROTECH, INC.

Inventor： MCMULLEN, Timothy, Allen ,  SHEPLER, Jeffery, Allan ,  VANDER GIESSEN, Clint

IPC: G01R1/04 ,  G01R1/44 ,  G01R1/073 ,  G01R31/02 ,  G01R31/20

Abstract: Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.

Abstract translation: 本文公开了用于在扩展温度范围上进行晶片级测试的探针系统，存储介质和方法。 该方法被配置为测试存在于衬底上的多个待测试器件（DUT）。 探针系统被编程为执行这些方法。 存储介质包括指示探测系统执行这些方法的计算机可读指令。