公开(公告)号：JPH05198654A

公开(公告)日：1993-08-06

申请号：JP18100092

申请日：1992-07-08

Applicant: CASCADE MICROTECH INC

Inventor： SUKOTSUTO EICHI RANBAUFU ,  ANDORIYUU SHII DABUIDOSON

IPC: G01R31/26 ,  G01R31/27 ,  H01L21/66 ,  H01L31/10

Abstract: PURPOSE: To accurately inspect a 2-terminal microwave device on a wafer, without using a special device or an attachment by measuring a characteristics of a microwave device with a diode assigned parallel to the microwave device in forward-direction bias state, etc. CONSTITUTION: With a wafer 10 comprising a microwave device 12b connected between a first contact point 13 on an upper side surface 14 and a ground surface 16 on a lower side surface prepared, diodes 12a and 12c assigned, side by side with the microwave device 12b are connected between the second contact point 13 on the upper side surface 14 and the ground surface 16, with a given sideward spacing between the first and second contact points 13 provided. In addition, a microwave probe 19 wherein, comprising a ground conductor 28 and a signal conductor 25, their sideward spacings agree with each other is prepared. An operation parameter which characterizes the microwave device 12b is measured through the signal conductor 25 and the ground conductor 28, with the diodes 12a and 12c in forward-direction bias, by applying a first voltage between a ground conductor 28 and the ground surface 16.