Patent search ap:("CASCADE MICROTECH INC") AND inv:"KINBARII AARU GURIISON" Page 1

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发明专利
WAFER PROBE 失效

公开(公告)号：JPS63313832A

公开(公告)日：1988-12-21

申请号：JP1436588

申请日：1988-01-25

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYU SUTORITSUDO , KINBARII AARU GURIISON

IPC: G01R31/26 , G01R1/073 , G01R31/28 , H01L21/00 , H05K13/08

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