公开(公告)号：JP2002033374A

公开(公告)日：2002-01-31

申请号：JP2001136081

申请日：2001-05-07

Applicant: CASCADE MICROTECH INC

Inventor： DANIEL L HARRIS ,  PETER R MCCANN

IPC: G01R31/26 ,  G01R1/04 ,  G01R31/28 ,  H01L21/00 ,  H01L21/66 ,  H01L21/68 ,  H01L21/683

Abstract: PROBLEM TO BE SOLVED: To provide a compact chuck for a probe station that quickly and accurately carries out angle indexing to a device to be tested. SOLUTION: This chuck 12 is equipped with bases 16 and 56, mounted on the probe station 10, a shaft 52 mounted on the bases, while the shaft can be rotated, and a device-mounting member 50 that is fixed to the shaft, while the member is rotated with the shaft. Essentially regardless of the direction of the shaft to the device-mounting member 50, the device-mounting member has a direction of a plane to the base. An O-ring 76, with a large diameter is provided between the base and the device-mounting member and the device- mounting member, is supported by the O-ring 76 regardless of the verticality of the shaft 52 for maintaining consistent horizontality, thus reducing the length of the shaft, the height and volume of the chuck, and making the probe station compact.