公开(公告)号：JPH0653293A

公开(公告)日：1994-02-25

申请号：JP13596393

申请日：1993-06-07

Applicant: CASCADE MICROTECH INC

Inventor： RANDEII JIEI SHIYUBINDO ,  UOOREN KEI HAAUTSUDO ,  POORU EI TAABO ,  KENESU AARU SUMISU ,  RICHIYAADO ETSUCHI WAANAA ,  PIITAA DEII ANDORIYUUSU

IPC: H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687

Abstract: PURPOSE: To obtain a probe station having Kelvin connection and shielding system which is immediately applicable and protective by installing a detachable electric connector assembly on a chuck assembly, having connector elements which are connected, in a pair relation, with first and second chuck assemblies. CONSTITUTION: This probe station is provided with an integrated protective system which facilitates the use of a station for measuring a small current, and integrated Kelvin connection for eliminating voltage loss due to line resistance. The station has a chuck assembly 20 constituted of three chuck assembly elements 80, 81, 83. The first element 80 retains a test equipment. The second element 81 under the first element acts as a protective body for reducing a leakage current. The elements 80, 81 are electrically insulating from each other and from a retaining structure, which is the third element 83 located below.