公开(公告)号：JPH09178775A

公开(公告)日：1997-07-11

申请号：JP31778096

申请日：1996-11-28

Applicant: CASCADE MICROTECH INC

Inventor： RANDEI JIEI SHIYUBUINTO

IPC: G01R1/073 ,  G01R1/18 ,  G01R31/02 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive probe card for measuring ultra-low current reaching femto-ampere region. SOLUTION: The edge part of a plurality of ceramic probing devices 34 in blade-shaped body is mounted to the surrounding of the opening of a dielectric board 26 made of glass - epoxy material and the tip of the probe fixed to the tip part of the blade-shaped body is located on the probe pattern of a test device under the opening. A probe card has a plurality of cables 24 for connecting the card 20 and the channel of a testing device. A board upper part 30 of the cables 24 is in coaxial type and includes an inner layer for suppressing the friction electrical effect between an inner dielectric and an external conductor. An inner conductive region and the rear surface conductor of the probing devices 34 are set to a guard potential through the external conductor, thus guarding a signal path at the other side of the probing device 34. An introduction part 28 of the cables 24 is connected to a board upper part 30 with a connector, is in coaxial type, and has an inner layer and a shield layer between the inner dielectric and the external conductor. A conductor cover 70 and a side conductive region shield parts on the card 20.