公开(公告)号：JPH08321530A

公开(公告)日：1996-12-03

申请号：JP9685396

申请日：1996-04-18

Applicant: CASCADE MICROTECH INC

Inventor： RANDEI SHIYUWAINDO

IPC: G01R1/06 ,  G01R19/32 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To greatly reduce the noise observed in a low-current and low-voltage measurement by electrically connecting a conductive material layer fixed to an insulation layer to either a chuck supporting a tester or a support surface and placing these two layers between a support surface and the chuck. SOLUTION: A sensor 81 detects temp. near a tester 60 higher or lower than the ambient temp., to thereby control the temp. of a gas or fluid flowing through a temp. chuck 50 according to this detected temp., and two layers are provided which form a conductive layer 40 fixed to a support surface 45 for the tester 60 and an insulation layer 10. The conductive layer 40 electrically is connected to the chuck 50 or the support surface 45, and its two layers are disposed between the surface 45 and chuck 50, thereby greatly reducing the noise observed during a low-current and low-voltage measuring.