公开(公告)号：JPH10339743A

公开(公告)日：1998-12-22

申请号：JP14754298

申请日：1998-05-28

Applicant: CASCADE MICROTECH INC

Inventor： RANDY SCHWINDT

IPC: G01R1/073 ,  G01R1/067 ,  G01R19/00 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66 ,  H01R11/18

Abstract: PROBLEM TO BE SOLVED: To provide a low current measuring system reducing a noise level. SOLUTION: A probe device for the low current measuring system has a dielectric blade 60 having 1st and 2nd side faces, slender conductive route 64 on the 1st side face, probe needle 68 connected to one end of this conductive route so as to be protruded from the dielectric base in the form of beam held on one side, and a conductive domain on the 2nd side face of dielectric base. A probe housing 50 is hung on the probe device attachably and detachably, and the probe housing is hung on both a force cable having a force lead wire 72 surrounded by a guard lead wire and a sense cable having a sense lead wire 74 surrounded by the guard lead wire. When the probe device is hung on the probe housing, a 1st coupler electrically connects the force lead wire 72, sense lead wire 74 and conductive route 64 one and another and a 2nd coupler electrically connects the force cable, the guard lead wire of sense cable and the conductive domain.