公开(公告)号：JPH06160236A

公开(公告)日：1994-06-07

申请号：JP17557092

申请日：1992-07-02

Applicant: CASCADE MICROTECH INC

Inventor： SUKOTSUTO ETSUCHI RAMUBAUGU

IPC: G01M11/00 ,  G02B6/00 ,  G02B6/36

Abstract: PURPOSE: To provide an optical fiber probe which can be easily replaced and is provided with an optical fiber of such length as to minimize optical transmission effect in multi-mode and in which the damage caused by excessive advancement of a probe end of the optical fiber at a test device or a fiber probe end can be prevented. CONSTITUTION: A probe main body 10 comprising a tip end 12 which selectively approaches an photo-electronic test device and a thin and long optical fiber 16 which, extending in the longitudinal direction along the probe main boDy 10, is projected, from the tip end, ARE provided. In addition, the probe main body 10 is provided with a means which generously guides the optical fiber 16 toward a probe tip end 16a and generously holes the optical fiber 16 at a specified position of the probe tip end 16a, or, a channel 20 bent downward, is provided, and a thin and long part of the optical fiber is so configured that it can move in longitudinal direction against the probe tip end and the probe main body.