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公开(公告)号：CA2229717A1
公开(公告)日：1997-02-13
申请号：CA2229717
申请日：1996-07-25
Applicant: CENTER FOR ADVANCED FIBEROPTIC
Inventor： SOAVE ROBERT J , TASKER G WILLIAM , THEN ALAN M , SHANK STEVEN M
Abstract: Manufacture of a microchannel plate may be improved using photoelectrochemic al etching and thin film activation such as CVD and nitriding and oxidizing wal l surface portions (28) of pores (12) formed in the substrate (10). The pore pattern may be changed by oxidizing and etching the substrate prior to activation.
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