Abstract:
A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract:
A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.
Abstract:
An ultrasound transducer may be driven by a driver circuit having one or more charge pumps and a multi-level inverter. The one or more charge pumps are configured to drive the ultrasound transducer only during output transitions of the inverter.
Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The PMUT consists of a flexural membrane that is piezoelectrically actuated. These membranes are formed on a first substrate that is bonded to a second substrate. The two substrates are separated by an air gap to allow the PMUT to vibrate. Several methods for joining the two substrates are described.
Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.
Abstract:
An ultrasonic time of flight range sensor is based on an array of two or more ultrasound transducers that are arranged as an endfire phased array. The acoustic beam profile of the array can be shaped using two degrees of freedom: the distance between the transducers of the array and the electronic delay applied to the transducers' outputs. This allows the array to have a more directional response, so that objects in a desired direction can be detected while objects in other directions are ignored. Differential measurements are used to reduce or cancel the ring-down signal that follows transmission. This ring-down cancellation is important in micromachined ultrasonic transducers that typically have narrow bandwidth and therefore poor pulse response. The differential endfire array can be used for ultrasonic rangefinding and object detection in consumer electronics devices such as smart phones, tablets, personal computers, monitors, and display devices.
Abstract:
A rangefinding apparatus and method are disclosed. The apparatus may include at least one processor and memory operably connected to the at least one processor. The memory may store instructions that, when executed, cause the apparatus to iterate a target-acquisition process until a target is identified and then iterate a target-tracking process after the target has been identified. The target-acquisition process may include transmitting a short ultrasonic pulse, transmitting a long ultrasonic pulse, and listening for one or more echoes corresponding to the short or long ultrasonic pulses. The target- tracking process may include steering an optimized ultrasonic pulse toward the target, listening for an echo corresponding to the optimized ultrasonic pulse, and calculating, based on the echo, an updated location for the target.
Abstract:
An ultrasonic transceiver system includes a transmitter block, a receiver block, a state machine, a computer unit. The transmitter block contains circuitry configured to drive an ultrasound transducer. The receiver block contains circuitry configured to receive signals from the ultrasound transducer and convert the signals into digital data. The state machine is coupled to the transmitter and receiver blocks and contains circuitry configured to act as a controller for those blocks. The computing unit is coupled to the transmitter block, the receiver block, and the state machine and is configured to drive the transmitter block and process data received from the receiver block by executing instructions of a program. The program memory is coupled to the computing unit and is configured to store the program. The computing unit is configured to be reprogrammed with one or more additional programs stored in the program memory.
Abstract:
An apparatus comprises an ultrasonic transducer having a first and second electrode and switches which configured to selectively connect the first and second electrodes to a transmit voltage source or to a receive amplifier. The switches are configured to selectively connect a first input of the amplifier to the first electrode of the transducer and to selectively connect a second input of the amplifier to the second electrode of the transducer. The switches are also configured to selectively connect the voltage source to the first and second electrodes of the transducer. The transducer may include a piezoelectric layer attached to and sandwiched between the first electrode and the second electrode, and a flexible membrane attached to the first electrode. The piezoelectric layer may be patterned to form an annular ring at the outer diameter of the flexible membrane.
Abstract:
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.