公开(公告)号：US20220208618A1

公开(公告)日：2022-06-30

申请号：US17562238

申请日：2021-12-27

Applicant: CHROMA ATE INC.

Inventor： SHIH-YAO PAN ,  HUNG-TIEN KAO

IPC: H01L21/66 ,  H04N5/232

Abstract: The present invention discloses an optical detection apparatus for defining a detection surface on a carrier unit for a wafer in a semiconductor manufacturing process so as to obtain a corresponding detection image, wherein a vertical movement path for another device to move is defined above the carrier unit. The optical detection apparatus includes a support, and an imaging device disposed on the support and configured to be non-interfering with the movement path. The imaging device includes a lens group, an image capturing portion and a moving base. With the moving base, the photosensitive element of the image capturing portion is allowed to move horizontally relative to the lens group, and the imaging position can be adjusted, preventing image deformation or a reduced resolution easily caused by capturing at an oblique angle. Thus, the optical detection apparatus resolves complications of additionally mounting an optical detection apparatus in an optical detection environment within a narrow space.