公开(公告)号：WO2005026707A3

公开(公告)日：2005-06-09

申请号：PCT/FR2004050443

申请日：2004-09-17

Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  PETIT JEROME ,  CHATON PATRICK ,  GRAND GILLES ,  LEROUX THIERRY

Inventor： PETIT JEROME ,  CHATON PATRICK ,  GRAND GILLES ,  LEROUX THIERRY

IPC: G01B11/06 ,  G01B11/24 ,  G01B11/30 ,  G01N21/956

CPC classification number: G01N21/956 ,  G01B11/0616 ,  G01N21/95623

Abstract: The invention concerns a device for measuring dimensional or structural characteristics of an object, comprising: means (2) for forming an image of the optical Fourier transform of an elementary surface of the object in the image focal plane; processing means (26) for producing data concerning at least one dimensional and/or structural characteristic of the object based on the data supplied by the detecting means.

Abstract translation: 本发明涉及一种用于测量物体的尺寸或结构特征的装置，包括：用于在图像焦平面中形成物体的基本表面的光学傅立叶变换的图像的装置（2）; 处理装置（26），用于基于由检测装置提供的数据产生关于对象的至少一维和/或结构特征的数据。

公开(公告)号：FR2859781B1

公开(公告)日：2007-07-06

申请号：FR0350560

申请日：2003-09-17

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： PETIT JEROME ,  CHATON PATRICK ,  GRAND GILLES ,  LEROUX THIERRY

IPC: G01B11/00 ,  G01B11/06 ,  G01B11/24 ,  G01B11/30 ,  G01N21/956

Abstract: The device has a measuring objective (2) to form an image from an optical Fourier transform of an elementary surface of an object in a Fourier image focal plane. A transfer unit (10, 12) forms the image on a CCD camera (14). A calculating unit (26) produces data concerning dimensional and/or structural characteristics of the object or identifies the characteristics from information provided by the camera. An independent claim is also included for a method to measure dimensional and/or structural characteristics of an object.

公开(公告)号：FR2859781A1

公开(公告)日：2005-03-18

申请号：FR0350560

申请日：2003-09-17

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： PETIT JEROME ,  CHATON PATRICK ,  GRAND GILLES ,  LEROUX THIERRY

IPC: G01B11/06 ,  G01B11/24 ,  G01B11/30 ,  G01N21/956 ,  G01B11/00

Abstract: The device has a measuring objective (2) to form an image from an optical Fourier transform of an elementary surface of an object in a Fourier image focal plane. A transfer unit (10, 12) forms the image on a CCD camera (14). A calculating unit (26) produces data concerning dimensional and/or structural characteristics of the object or identifies the characteristics from information provided by the camera. An independent claim is also included for a method to measure dimensional and/or structural characteristics of an object.