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公开(公告)号：JPS6256083B2
公开(公告)日：1987-11-24
申请号：JP20793484
申请日：1984-10-03
Applicant: COMP GENERALE ELECTRICITE
Inventor： JATSUKU FUARI
IPC: C01B33/02 , C30B11/00 , F27B14/00 , H01L21/02 , H01L21/208
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