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公开(公告)号：JPS6150881B2
公开(公告)日：1986-11-06
申请号：JP8699279
申请日：1979-07-11
Applicant: COMP GENERALE ELECTRICITE
Inventor： JATSUKU FUARII
IPC: C01B33/02 , C01B33/037 , C30B11/00 , H01L31/04
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