APPARATUS AND METHOD OF PEELING A MULTI-LAYER SUBSTRATE

    公开(公告)号:SG11201704065SA

    公开(公告)日:2017-06-29

    申请号:SG11201704065S

    申请日:2015-11-17

    Applicant: CORNING INC

    Abstract: Methods are provided for processing a first substrate with a first major surface of the first substrate removably bonded to a first major surface of a carrier substrate. Example methods include the step of controlling a bend radius of the carrier substrate while peeling the carrier substrate from the first substrate. In further examples, methods include the step of peeling a leading peripheral edge of the carrier substrate from the first substrate with an attachment member while the attachment member pivots relative to an arm. Example peeling apparatus are also provided with an arm supporting a vacuum attachment member, wherein the arm is pivotally attached to a vacuum plate.

    APPARATUS AND METHOD OF PEELING A MULTI-LAYER SUBSTRATE

    公开(公告)号:SG10201902920SA

    公开(公告)日:2019-05-30

    申请号:SG10201902920S

    申请日:2015-11-17

    Applicant: CORNING INC

    Abstract: APPARATUS AND METHOD OF PEELING A MULTI-LAYER SUBSTRATE Methods are provided for processing a first substrate with a first major surface of the first substrate removably bonded to a first major surface of a carrier substrate. Example methods include the step of controlling a bend radius of the carrier substrate while peeling the carrier substrate from the first substrate. In further examples, methods include the step of peeling a leading peripheral edge of the carrier substrate from the first substrate with an attachment member while the attachment member pivots relative to an arm. Example peeling apparatus are also provided with an arm supporting a vacuum attachment member, wherein the arm is pivotally attached to a vacuum plate. Fig. 1

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