公开(公告)号：AU1448300A

公开(公告)日：2000-05-15

申请号：AU1448300

申请日：1999-10-20

Applicant: CORNING INC

Inventor： BROPHY CHRISTOPHER P ,  DAROL CHAMBERLAIN ,  EDWARDS VICTORIA A ,  EID BERNARD

IPC: G02B26/08 ,  B81B5/00 ,  G02B6/12 ,  G02B6/13 ,  G02B6/35 ,  G02B26/02 ,  G02B6/26

Abstract: A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 mum wide and 2 mum thick, resulting in shorter actuation distances of approximately 15 mum. This feature results in an optical switch having faster switching times.

公开(公告)号：CA2346451A1

公开(公告)日：2000-05-04

申请号：CA2346451

申请日：1999-10-20

Applicant: CORNING INC

Inventor： DAROL CHAMBERLAIN ,  BROPHY CHRISTOPHER P ,  EDWARDS VICTORIA A ,  EID BERNARD

IPC: G02B26/08 ,  B81B5/00 ,  G02B6/12 ,  G02B6/13 ,  G02B6/35 ,  G02B26/02

Abstract: A fluid encapsulated MEMS optical switch includes an optical waveguide matri x with MEMS mirrors (22) situated in trenches located at waveguide cross-point s (29). The trenches are filled with collimation-maintaining fluid (30) and th e mirrors (22) are immersed therein. The collimation maintaining fluid (30) prevents the light beam from spreading when it enters the switch cross-point s. This feature enables the use of much smaller MEMS mirrors (22) and prevents some of the typical MEMS mirror (22) problems found in the related art. In particular, the MEMS mirrors (22) disclosed in the present invention is reduced to approximately 15 wide and 2 thick, resulting in shorter actuation distances to approximately 15. This feature results in an optical switch having faster switching times.

公开(公告)号：WO0025160A9

公开(公告)日：2000-09-28

申请号：PCT/US9924591

申请日：1999-10-20

Applicant: CORNING INC

Inventor： BROPHY CHRISTOPHER P ,  DAROL CHAMBERLAIN ,  EDWARDS VICTORIA A ,  EID BERNARD

IPC: G02B26/08 ,  B81B5/00 ,  G02B6/12 ,  G02B6/13 ,  G02B6/35 ,  G02B26/02 ,  G02B6/26

CPC classification number: G02B6/3518 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3596 ,  G02B26/004

Abstract: A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors (22) situated in trenches located at waveguide cross-points (29). The trenches are filled with collimation-maintaining fluid (30) and the mirrors (22) are immersed therein. The collimation maintaining fluid (30) prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors (22) and prevents some of the typical MEMS mirror (22) problems found in the related art. In particular, the MEMS mirrors (22) disclosed in the present invention is reduced to approximately 15 wide and 2 thick, resulting in shorter actuation distances to approximately 15. This feature results in an optical switch having faster switching times.

Abstract translation: 流体封装的MEMS光开关包括具有位于波导交叉点（29）处的沟槽中的MEMS反射镜（22）的光波导矩阵。 用准直保持流体（30）填充沟槽，并将反射镜（22）浸入其中。 准直维持流体（30）防止光束在进入开关交叉点时扩散。 该特征使得能够使用更小的MEMS反射镜（22）并且防止在相关技术中发现的一些典型的MEMS反射镜（22）问题。 特别地，本发明中公开的MEMS反射镜（22）减小到大约15宽和2厚，导致更短的致动距离到大约15°。该特征导致具有更快切换时间的光开关。

公开(公告)号：EP1141755A4

公开(公告)日：2002-01-16

申请号：EP99971100

申请日：1999-10-20

Applicant: CORNING INC

Inventor： BROPHY CHRISTOPHER P ,  DAROL CHAMBERLAIN ,  EDWARDS VICTORIA A ,  EID BERNARD

IPC: G02B26/08 ,  B81B5/00 ,  G02B6/12 ,  G02B6/13 ,  G02B6/35 ,  G02B26/02 ,  G02B6/26

CPC classification number: G02B6/3518 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3596 ,  G02B26/004

Abstract: A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors (22) situated in trenches located at waveguide cross-points (29). The trenches are filled with collimation-maintaining fluid (30) and the mirrors (22) are immersed therein. The collimation maintaining fluid (30) prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors (22) and prevents some of the typical MEMS mirror (22) problems found in the related art. In particular, the MEMS mirrors (22) disclosed in the present invention is reduced to approximately 15 wide and 2 thick, resulting in shorter actuation distances to approximately 15. This feature results in an optical switch having faster switching times.

Abstract translation: 流体封装的MEMS光开关包括具有位于波导交叉点的沟槽中的MEMS镜的光波导矩阵。 沟槽填充准直维持流体，并将反射镜浸入其中。 准直维持流体防止光束进入开关交叉点时扩散。 该特征使得能够使用更小的MEMS反射镜并且防止在现有技术中发现的一些典型的MEMS镜像问题。 特别地，本发明中公开的MEMS镜减小到约15μm宽和2μm厚，导致较短的致动距离约为15μm。 该特征导致具有更快开关时间的光开关。