ELECTRON MULTIPLIER ARRAY
    1.
    发明申请
    ELECTRON MULTIPLIER ARRAY 审中-公开
    电子漫射阵列

    公开(公告)号:WO2004088712A2

    公开(公告)日:2004-10-14

    申请号:PCT/GB2004001434

    申请日:2004-04-01

    CPC classification number: H01J43/243 A61B6/4429

    Abstract: The electron multiplier array consists of a plurality of multiplier channels (1) with each channel generally comprising a substrate (2), an anode (5) and a series of stacked insulation layers (7) and dynode layers (11) describing the walls of the channel. The electron multiplier array is robust and reduces the extent of the correction required for variations in performance between channels.

    Abstract translation: 电子倍增器阵列由多个乘法器通道(1)组成,每个通道通常包括衬底(2),阳极(5)和一系列堆叠绝缘层(7)和倍增极层(11),其描述了 这个频道。 电子倍增器阵列是鲁棒的,并且减少了通道之间的性能变化所需的校正的程度。

    FIBRE OPTIC BASED SEMICONDUCTOR MICRO SENSORS FOR SENSING PRESSURE OR TEMPERATURE, FABRICATION METHODS OF SAID SENSORS, AND A METHOD OF SECURING AN OPTICAL FIBRE TO A SILICON BLOCK
    2.
    发明申请
    FIBRE OPTIC BASED SEMICONDUCTOR MICRO SENSORS FOR SENSING PRESSURE OR TEMPERATURE, FABRICATION METHODS OF SAID SENSORS, AND A METHOD OF SECURING AN OPTICAL FIBRE TO A SILICON BLOCK 审中-公开
    用于传感压力或温度的光纤光学半导体微型传感器,传感器的制造方法以及将光纤固定到硅块的方法

    公开(公告)号:WO2004034007A9

    公开(公告)日:2004-09-02

    申请号:PCT/GB0304362

    申请日:2003-10-08

    CPC classification number: G01L9/0079 G01L9/0042

    Abstract: An optical micro sensor (1) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor (1) is fabricated using MEMS technology and is adapted to receive an optical fibre (40) which communicates radiation to and from the micro sensor (1). The sensor (1) has an environmentally-sensitive element (4) which modifies the incident radiation communicated by the optical fibre (40). The modified radiation is communicated back along the optical fibre (40) and provides information regarding the environmental conditions surrounding the sensor (1). The pressure sensor is provided with a Fabry Perot cavity (3) in a first surface of a silicon wafer (2). The cavity is covered by a reflector at the environmentally-sensitive element (4). The diameter of the channel (7) holding the optical fibre (40) is greater than the diameter of the cavity (3). The temperature sensor is provided with luminescent material at the element (4). Also, a method of securing an optical fibre to a silicon block is claimed.

    Abstract translation: 一种用于通过改变入射辐射来测量一个或多个环境参数(例如压力和温度)的光学微传感器(1)。 传感器(1)使用MEMS技术制造并且适于接收将光辐射与微传感器(1)进行通信的光纤(40)。 传感器(1)具有对由光纤(40)传播的入射辐射进行改变的环境敏感元件(4)。 改变的辐射沿着光纤(40)传回,并提供关于传感器(1)周围的环境条件的信息。 压力传感器在硅晶片(2)的第一表面中设置有法布里珀罗腔(3)。 空腔由环境敏感元件(4)上的反射器覆盖。 保持光纤(40)的通道(7)的直径大于空腔(3)的直径。 温度传感器在元件(4)处设置有发光材料。 另外,要求保护光纤到硅块的方法。

    OPTICAL MICRO SENSOR
    3.
    发明申请
    OPTICAL MICRO SENSOR 审中-公开
    光学传感器

    公开(公告)号:WO2004034007A2

    公开(公告)日:2004-04-22

    申请号:PCT/GB0304362

    申请日:2003-10-08

    CPC classification number: G01L9/0079 G01L9/0042

    Abstract: An optical micro sensor (1) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor (1) is fabricated using MEMS technology and is adapted to receive an optical fibre (40) which communicates radiation to and from the micro sensor (1). The sensor (1) has an environmentally-sensitive element (4) which modifies the incident radiation communicated by the optical fibre (40). The modified radiation is communicated back along the optical fibre (40) and provides information regarding the environmental conditions surrounding the sensor 1.

    Abstract translation: 一种用于通过改变入射辐射来测量一个或多个环境参数(如压力和温度)的光学微传感器(1)。 传感器(1)使用MEMS技术制造并且适于接收将光辐射与微传感器(1)进行通信的光纤(40)。 传感器(1)具有对由光纤(40)传播的入射辐射进行改变的环境敏感元件(4)。 修改的辐射沿着光纤(40)传回,并提供关于传感器1周围的环境条件的信息。

    METHOD OF FABRICATING AN ELECTRON MULTIPLIER ARRAY
    4.
    发明申请
    METHOD OF FABRICATING AN ELECTRON MULTIPLIER ARRAY 审中-公开
    制作电子乘法器阵列的方法

    公开(公告)号:WO2005006387A3

    公开(公告)日:2005-05-12

    申请号:PCT/GB2004002962

    申请日:2004-07-08

    Inventor: STEVENS ROBERT

    CPC classification number: H01J43/246 A61B6/4429 G03G15/0435

    Abstract: A method of fabricating an electron multiplier array in which a plurality of apertures are etched through a construct (20) of a dynode layer (11) and an electrical-insulating layer (12) with a jet of hard powders (22). The construct (20) is then divided into smaller discrete segments and stacked such that the apertures in adjacent segments align to form channels. Alternatively, rather than dividing the construct (20) into smaller segments, a plurality of constructs (20) may instead be stacked to create a large-area electron multiplier array.

    Abstract translation: 一种制造电子倍增器阵列的方法,其中通过打磨极层(11)的结构(20)和具有硬粉末射流(22)的电绝缘层(12)蚀刻多个孔。 然后将结构(20)分成较小的离散段并堆叠,使得相邻段中的孔对齐以形成通道。 或者,不是将结构(20)分成更小的部分,而是可以堆叠多个结构(20)以形成大面积的电子倍增器阵列。

    OPTICAL MICRO SENSOR
    6.
    发明专利

    公开(公告)号:AU2003271921A1

    公开(公告)日:2004-05-04

    申请号:AU2003271921

    申请日:2003-10-08

    Abstract: An optical micro sensor ( 1 ) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor ( 1 ) is fabricated using MEMS technology and is adapted to receive an optical fibre ( 40 ) which communicates radiation to and from the micro sensor ( 1 ). The sensor ( 1 ) has an environmentally-sensitive element ( 4 ) which modifies the incident radiation communicated by the optical fibre ( 40 ). The modified radiation is communicated back along the optical fibre ( 40 ) and provides information regarding the environmental conditions surrounding the sensor ( 1 ). The pressure sensor is provided with a Fabry Perot cavity ( 3 ) in a first surface of a silicon wafer ( 2 ). The cavity is covered by a reflector at the environmentally-sensitive element ( 4 ). The diameter of the channel ( 7 ) holding the optical fibre ( 40 ) is greater than the diameter of the cavity. ( 3 ). The temperature sensor is provided with luminescent material at the element ( 4 ). Also, a method of securing an optical fibre to a silicon block is claimed.

    Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block

    公开(公告)号:AU2003271921A8

    公开(公告)日:2004-05-04

    申请号:AU2003271921

    申请日:2003-10-08

    Abstract: An optical micro sensor ( 1 ) for measuring one or more environmental parameters, such as pressure and temperature, through the modification of incident radiation. The sensor ( 1 ) is fabricated using MEMS technology and is adapted to receive an optical fibre ( 40 ) which communicates radiation to and from the micro sensor ( 1 ). The sensor ( 1 ) has an environmentally-sensitive element ( 4 ) which modifies the incident radiation communicated by the optical fibre ( 40 ). The modified radiation is communicated back along the optical fibre ( 40 ) and provides information regarding the environmental conditions surrounding the sensor ( 1 ). The pressure sensor is provided with a Fabry Perot cavity ( 3 ) in a first surface of a silicon wafer ( 2 ). The cavity is covered by a reflector at the environmentally-sensitive element ( 4 ). The diameter of the channel ( 7 ) holding the optical fibre ( 40 ) is greater than the diameter of the cavity. ( 3 ). The temperature sensor is provided with luminescent material at the element ( 4 ). Also, a method of securing an optical fibre to a silicon block is claimed.

    MOBILE PLATFORM
    10.
    发明申请
    MOBILE PLATFORM 审中-公开
    移动平台

    公开(公告)号:WO2011042338A3

    公开(公告)日:2012-03-15

    申请号:PCT/EP2010064446

    申请日:2010-09-29

    CPC classification number: G09B9/04 G09B9/02 G09B9/06 G09B9/14

    Abstract: A motion platform for use in a simulator comprising linear slides 20, 30 providing surge and sway and a rotary table 40 providing yaw. Payload carrying platform 100 is mounted on the rotary table 40 via three bell cranks 56, 57, 58 to provide heave, pitch and roll.

    Abstract translation: 一种用于模拟器的运动平台,包括提供浪涌和摇摆的线性滑块20,30,以及提供偏航的旋转台40。 有载荷承载平台100通过三个钟形曲柄56,57,58安装在转台40上,以提供起伏,俯仰和滚动。

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