公开(公告)号：EP2351169A4

公开(公告)日：2017-08-30

申请号：EP09822830

申请日：2009-10-24

Applicant: CYMER LLC

Inventor： FIGUEROA EFRAIN ,  PARTLO WILLIAM N ,  ALGOTS JOHN MARTIN

IPC: H01S3/10 ,  G01J3/02 ,  G01J3/06 ,  G01J3/12 ,  G01J3/14 ,  G01J3/18 ,  G02B5/18 ,  H01S3/08 ,  H01S3/1055 ,  H01S3/106

CPC classification number: H01S3/08009 ,  G01J3/02 ,  G01J3/0237 ,  G01J3/027 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1208 ,  G02B5/1828 ,  H01S3/08004 ,  H01S3/1055 ,  H01S3/1067

Abstract: The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

Abstract translation: 带宽选择机构包括安装在色散光学元件的第二面上的第一致动器，第二面与反射面相对，第一致动器具有耦合到第一端块的第一端和耦合到第二端的第二端 所述第一致动器可操作以将相等且相反的力施加到所述第一端块和所述第二端块上，以使所述色散光学元件的所述主体沿所述主体的所述纵向轴线弯曲，并沿垂直于所述反射面的第一方向弯曲 的色散光学元件。 带宽选择机构还包括第二致动器，第二致动器可操作以在垂直于色散光学元件的反射面的第二方向上施加相等且相反的力以沿着主体的纵向轴线弯曲主体。