公开(公告)号：WO2012054423A1

公开(公告)日：2012-04-26

申请号：PCT/US2011/056626

申请日：2011-10-18

Applicant: CASCADE MICROTECH, INC. ,  NEGISHI, Kazuki ,  HARRIS, Steve ,  STRID, Eric, W. ,  BOLT, Bryan

Inventor： NEGISHI, Kazuki ,  HARRIS, Steve ,  STRID, Eric, W. ,  BOLT, Bryan

IPC: G01R31/26

CPC classification number: G01J1/32 ,  G01J1/0242 ,  G01J1/0425 ,  G01J2001/0481 ,  G01J2001/4247 ,  G01R31/2635

Abstract: Systems and methods for simultaneous optical testing of a plurality of devices under test. These systems and methods may include the use of an optical probe assembly that includes a power supply structure that is configured to provide an electric current to a plurality of devices under test (DUTs) and an optical collection structure that is configured to simultaneously collect electromagnetic radiation that may be produced by the plurality of DUTs and to provide the collected electromagnetic radiation to one or more optical detection devices. The systems and methods also may include the use of the optical probe assembly in an optical probe system to evaluate one or more performance parameters of each of the plurality of DUTs.

Abstract translation: 用于同时光学测试多个待测设备的系统和方法。 这些系统和方法可以包括使用光学探针组件，该光学探针组件包括电源结构，该电源结构被配置为向被测试的多个被测设备（DUT）提供电流，以及被配置为同时收集电磁辐射的光学收集结构 其可以由多个DUT产生并且将收集的电磁辐射提供给一个或多个光学检测装置。 所述系统和方法还可以包括在光学探针系统中使用光学探针组件来评估多个DUT中的每一个的一个或多个性能参数。

公开(公告)号：EP2630508A1

公开(公告)日：2013-08-28

申请号：EP11834955.4

申请日：2011-10-18

Applicant: Cascade Microtech, Inc.

Inventor： NEGISHI, Kazuki ,  HARRIS, Steve ,  STRID, Eric, W. ,  BOLT, Bryan

IPC: G01R31/26

CPC classification number: G01J1/32 ,  G01J1/0242 ,  G01J1/0425 ,  G01J2001/0481 ,  G01J2001/4247 ,  G01R31/2635

Abstract: Systems and methods for simultaneous optical testing of a plurality of devices under test. These systems and methods may include the use of an optical probe assembly that includes a power supply structure that is configured to provide an electric current to a plurality of devices under test (DUTs) and an optical collection structure that is configured to simultaneously collect electromagnetic radiation that may be produced by the plurality of DUTs and to provide the collected electromagnetic radiation to one or more optical detection devices. The systems and methods also may include the use of the optical probe assembly in an optical probe system to evaluate one or more performance parameters of each of the plurality of DUTs.