Film formation system and film formation method
    2.
    发明授权
    Film formation system and film formation method 有权
    成膜系统和成膜方法

    公开(公告)号:US08800478B2

    公开(公告)日:2014-08-12

    申请号:US12891939

    申请日:2010-09-28

    Applicant: Cheng-Kuo Yeh

    Inventor: Cheng-Kuo Yeh

    Abstract: A film formation system and a film formation method are disclosed. The film formation method includes the following steps performed in the film formation system that includes a container containing liquid, a liquid draining device for draining the liquid, a ring-shaped component installed in the container, and a carrying component installed in the liquid in the container for carrying at least a substrate: enabling the carrying component in the liquid and enabling the ring-shaped component to float on the liquid; when a film layer that is composed of nano-spheres is formed on the liquid, locating the film layer in a ring of the ring-shaped component; and removing the liquid, allowing the film layer to move downward in accordance with the ring-shaped component and be formed on the substrate, thereby preventing the nano-spheres from contacting an inner wall of the container and bursting, through the installation of the ring-shaped component.

    Abstract translation: 公开了一种成膜体系和成膜方法。 成膜方法包括在成膜系统中执行的以下步骤,其包括容纳液体的容器,用于排出液体的液体排出装置,安装在容器中的环形部件和安装在容器中的液体中的承载部件 用于承载至少一个基底的容器:使所述液体中的载体组分能够使所述环状组分漂浮在所述液体上; 当在液体上形成由纳米球形成的膜层时,将膜层定位在环状部件的环中; 并移除液体,使膜层根据环状部件向下移动并形成在基板上,从而防止纳米球体与容器的内壁接触并通过安装环形件而爆裂 形组件。

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