Abstract:
A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract:
A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.
Abstract:
An ultrasound transducer may be driven by a driver circuit having one or more charge pumps and a multi-level inverter. The one or more charge pumps are configured to drive the ultrasound transducer only during output transitions of the inverter.
Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) is disclosed. The device consists of a flexible membrane that is connected to a rigid substrate via flexures. The flexures are defined by slots etched through the perimeter of the membrane. These features release the stress present on the structural layers of the membrane, making it less sensitive to residual stress. The flexures are designed to act as torsion springs so that the membrane's vibration mode shape is highly curved in the piezoelectric actuation area, thereby increasing the electromechanical coupling.
Abstract:
An ultrasonic time of flight range sensor is based on an array of two or more ultrasound transducers that are arranged as an endfire phased array. The acoustic beam profile of the array can be shaped using two degrees of freedom: the distance between the transducers of the array and the electronic delay applied to the transducers' outputs. This allows the array to have a more directional response, so that objects in a desired direction can be detected while objects in other directions are ignored. Differential measurements are used to reduce or cancel the ring-down signal that follows transmission. This ring-down cancellation is important in micromachined ultrasonic transducers that typically have narrow bandwidth and therefore poor pulse response. The differential endfire array can be used for ultrasonic rangefinding and object detection in consumer electronics devices such as smart phones, tablets, personal computers, monitors, and display devices.
Abstract:
An ultrasonic transceiver system includes a transmitter block, a receiver block, a state machine, a computer unit. The transmitter block contains circuitry configured to drive an ultrasound transducer. The receiver block contains circuitry configured to receive signals from the ultrasound transducer and convert the signals into digital data. The state machine is coupled to the transmitter and receiver blocks and contains circuitry configured to act as a controller for those blocks. The computing unit is coupled to the transmitter block, the receiver block, and the state machine and is configured to drive the transmitter block and process data received from the receiver block by executing instructions of a program. The program memory is coupled to the computing unit and is configured to store the program. The computing unit is configured to be reprogrammed with one or more additional programs stored in the program memory.
Abstract:
A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.
Abstract:
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
Abstract:
An ultrasonic transmitter system includes a digital controller, bandpass pulse-width modulator (BP-PWM) unit, a digital to analog converter (DAC), and an ultrasound transducer. The controller generates pulse width and phase reference signals. The BP-PWM configured receives these signals generates a pulse width modulation (PWM) output characterized by a pulse width and a phase based on the pulse width and phase reference signals. The DAC) receives the PWM output from the BP-PWM unit and generates an output characterized by the pulse width and phase. The ultrasonic transducer receives the output from the DAC and generates an output sound pressure in response to the output from the DAC. An amplitude of the RMS sound pressure depends on the pulse width of the output from the DAC.
Abstract:
A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.