公开(公告)号：EP4354187A1

公开(公告)日：2024-04-17

申请号：EP23197237.3

申请日：2023-09-13

Applicant: Chroma ATE Inc.

Inventor： Hsieh, Cheng Chih ,  Wu, Tien Chi ,  Lee, Ming-Long ,  Lin, Yu-Hsuan ,  Lin, Tsung-I ,  Ma, Chien-Hao

IPC: G02B5/04 ,  G01B11/26 ,  G01B11/27

CPC classification number: G02B5/04 ,  G01B11/26 ,  G01B11/27

Abstract: The present invention relates to six-degree-of-freedom error correction method and apparatus. The apparatus comprises a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage is used for carrying a device under test; the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis; the light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device; the telecentric image measurement device is arranged on one side of the measurement optical axis and corresponds to the light splitter. The method controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device by means of the controller.