公开(公告)号：WO2015059595A1

公开(公告)日：2015-04-30

申请号：PCT/IB2014/065138

申请日：2014-10-08

Applicant: DANFOSS A/S

Inventor： CHIRIAEV, Serguei ,  MATZEN, Steen Møllebjerg

IPC: G01L9/00 ,  G01K7/16 ,  G01K1/26

CPC classification number: G01L9/0044 ,  G01K1/26 ,  G01K7/16

Abstract: A thin film sensor element (4) comprising a diaphragm (6), a first thin film electrically insulating layer (7), a thin film constraining layer (8), and a thin film sensor layer (10), said sensor layer comprising one or more sensing components, forming a layered thin film structure, where the diaphragm (6) serves as a substrate for the thin film layers (7, 8, 10). The first electrically insulating layer (7) is arranged between the diaphragm (6) and the constraining layer (8), and the constraining layer (8) is arranged between the first electrically insulating layer (7) and the sensing components (10). The first electrically insulating layer (7) is made from a material which has a Young's modulus which is significantly lower than a Young's modulus of the material of the diaphragm (6), and which is significantly lower than a Young's modulus of the material of the constraining layer (8). Thereby relaxation of strain in the first electrically insulating layer (7) is constrained, and signal drift of the sensor element (4) is minimised.

Abstract translation: 一种薄膜传感器元件（4），包括隔膜（6），第一薄膜电绝缘层（7），薄膜约束层（8）和薄膜传感器层（10），所述传感器层包括一个 或更多的感测部件，形成分层薄膜结构，其中隔膜（6）用作薄膜层（7,8,10）的基板。 第一电绝缘层（7）设置在隔膜（6）和约束层（8）之间，约束层（8）布置在第一电绝缘层（7）和感测部件（10）之间。 第一电绝缘层（7）由具有明显低于膜片（6）的材料的杨氏模量的杨氏模量的材料制成，并且显着低于材料的杨氏模量 约束层（8）。 由此约束了第一电绝缘层（7）中的应变松弛，并且使传感器元件（4）的信号漂移最小化。

公开(公告)号：WO2014199247A1

公开(公告)日：2014-12-18

申请号：PCT/IB2014/061281

申请日：2014-05-08

Applicant: DANFOSS A/S

Inventor： MATZEN, Steen Møllebjerg

IPC: G01L9/00 ,  G01L9/04

CPC classification number: G01L9/0055 ,  G01L9/04

Abstract: A sensor (1) comprising a membrane, an isolation layer (3) arranged on the membrane, measuring electronics comprising a thin film circuit (4), e.g. in the form of a Wheatstone bridge, deposited on the isolation layer (3), and a power supply (14) arranged to supply a quasi-DC voltage to the thin film circuit (4) is disclosed. The sensor (1) is cost effective to manufacture, due to the thin film circuit (4), and corrosion effects are avoided, without having to apply a coating or passivation layer onto the thin film circuit (4), due to the quasi-DC voltage being supplied to the thin film circuit (4).

Abstract translation: 包括膜的传感器（1），布置在膜上的隔离层（3），测量电子器件包括薄膜电路（4），例如薄膜电路。 公开了以薄片电路（4）提供准直流电压的电源（14），其形式为沉积在隔离层（3）上的惠斯登电桥形式。 由于薄膜电路（4），传感器（1）由于薄膜电路（4）的制造而具有成本效益，并且避免了腐蚀效应，而不必在薄膜电路（4）上施加涂层或钝化层， DC电压被提供给薄膜电路（4）。