RF MEMS switch with a flexible and free switch membrane

    公开(公告)号:ZA200707988B

    公开(公告)日:2008-06-25

    申请号:ZA200707988

    申请日:2007-09-17

    Applicant: DELFMEMS

    Inventor: OLIVIER MILLET

    Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

Patent Agency Ranking