公开(公告)号：US20160181040A1

公开(公告)日：2016-06-23

申请号：US14977483

申请日：2015-12-21

Applicant: DELFMEMS SAS

Inventor： Renaud Robin ,  Nicolas Lorphelin ,  Karim Segueni

IPC: H01H59/00 ,  B81B3/00 ,  H01H49/00 ,  B81C1/00

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0188 ,  H01H49/00 ,  H01H2059/0027 ,  H01H2059/0036 ,  H01H2227/004

Abstract: Systems and methods for a MEMS device, in particular, a MEMS switch, and the manufacture thereof are provided. In one example, said MEMS device comprises posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.

Abstract translation: 提供了用于MEMS器件，特别是MEMS开关的系统和方法及其制造。 在一个示例中，所述MEMS器件包括柱和在衬底上形成的导电（透射）线，并且在柱和导电线上形成膜。 所述膜包括第一膜层和第二膜层，所述第一膜层和所述第二膜层形成在所述第一膜上方的所述柱中的一个区域上和/或所述导电线上的区域中，使得所述第一膜层具有第二膜层 不与形成有第二膜层的区域相邻地形成。