Abstract:
PROBLEM TO BE SOLVED: To smooth and round micropores of a workpiece for calibration. SOLUTION: The workpiece is held on a positionable rotation rack 28. The rotation rack 28 passes a series of a calibration station, a polishing station and a washing station to move the workpiece. In the polishing station, a liquid polishing agent having flowability is made to flow into the micropores for a time based on a correlation relation having a statistical meaning in relation to an increase in calibration fluid flow rate. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
An abrasive liquid slurry for polishing and radiusing microholes comprises: a liquid medium; finely divided abrasive particles, wherein the slurry is characterized in that the abrasive particles remain uniformly distributed when the slurry is not subjected to shear, and the slurry decreases in viscosity when subjected to shear flowing through a microhole at a pressure of 0.69 to 13.79 Mpa; and a rheological additive to maintain distribution of said particles.
Abstract:
An abrasive liquid slurry for polishing and radiusing microholes comprises: a liquid medium; finely divided abrasive particles, wherein the slurry is characterized in that the abrasive particles remain uniformly distributed when the slurry is not subjected to shear, and the slurry decreases in viscosity when subjected to shear flowing through a microhole at a pressure of 0.69 to 13.79 Mpa; and a rheological additive to maintain distribution of said particles.
Abstract:
An abrasive liquid slurry for polishing and radiusing microholes comprises: a liquid medium; finely divided abrasive particles, wherein the slurry is characterized in that the abrasive particles remain uniformly distributed when the slurry is not subjected to shear, and the slurry decreases in viscosity when subjected to shear flowing through a microhole at a pressure of 0.69 to 13.79 Mpa; and a rheological additive to maintain distribution of said particles.