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公开(公告)号：DE69425323T2
公开(公告)日：2001-03-15
申请号：DE69425323
申请日：1994-08-24
Applicant: EBARA CORP
Inventor： NISHIOKA YUKIKO , KAMIYA ICHIRO , SHINJYO RYOUICHI , ISHII YOSHIHIRO , KOUSAKA KOUICHI
IPC: D06F43/08
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公开(公告)号：DE69425323D1
公开(公告)日：2000-08-24
申请号：DE69425323
申请日：1994-08-24
Applicant: EBARA CORP
Inventor： NISHIOKA YUKIKO , KAMIYA ICHIRO , SHINJYO RYOUICHI , ISHII YOSHIHIRO , KOUSAKA KOUICHI
IPC: D06F43/08
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