公开(公告)号：US20150210430A1

公开(公告)日：2015-07-30

申请号：US14419458

申请日：2013-08-07

Applicant: ENTEGRIS, INC.

Inventor： Donn K. Naito ,  Andy Krell ,  Mitchell W. McFeron ,  Steven Jackson ,  Joel Robison

IPC: B65D25/14 ,  H01L21/67 ,  B65D85/00 ,  B65D25/38 ,  B65D43/02

CPC classification number: B65D25/14 ,  B01J4/00 ,  B01J19/02 ,  B01J2219/0245 ,  B65D25/38 ,  B65D43/02 ,  B65D85/70 ,  H01L21/67023

Abstract: A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.

Abstract translation: 一种用于分配超高纯度化学试剂的供应容器，包括限定包含内表面结构的可封闭内部容积的金属容器，其中内表面结构涂覆有超高纯度有效的多氟全氟烷氧基涂层。 这种供应容器可以例如用于向半导体制造工具或用于制造平板显示器或太阳能电池板的工具的储存和分配超高纯度化学试剂。

公开(公告)号：US09695985B2

公开(公告)日：2017-07-04

申请号：US14380646

申请日：2013-02-22

Applicant: ENTEGRIS, INC.

Inventor： Jordan Hodges ,  Richard D. Chism ,  Mitchell W. McFeron ,  Donald D. Ware ,  Glenn M. Tom

IPC: F17C9/00 ,  B67D7/02

CPC classification number: F17C9/00 ,  B67D7/00 ,  B67D7/02 ,  B67D7/025 ,  B67D7/0272 ,  B67D7/0283 ,  F17C7/00

Abstract: A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.