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    RETICLE POD
    1.
    发明专利
    RETICLE POD 未知

    公开(公告)号：SG165407A1

    公开(公告)日：2010-10-28

    申请号：SG2010068617

    申请日：2006-09-27

    Applicant: ENTEGRIS INC

    Inventor： KOLBOW STEVEN P ,  MCMULLEN KEVIN ,  TIEBEN ANTHONY M ,  KUSZ MATTHEW ,  ANDERSEN CHRISTIAN ,  WANG HUAPING ,  CISEWSKI MICHAEL ,  JOHNSON MICHAEL L ,  HALBMAIER DAVID L ,  LYSTAD JOHN

    Abstract: A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint.Dual containment pod embodiment provides further isolation and protection.

    SHIPPER WITH TOOTH DESIGN FOR IMPROVED LOADING
    2.
    发明专利
    SHIPPER WITH TOOTH DESIGN FOR IMPROVED LOADING 未知

    公开(公告)号：MY140601A

    公开(公告)日：2009-12-31

    申请号：MYPI20044152

    申请日：2004-10-09

    Applicant: ENTEGRIS INC

    Inventor： DUBAN-HU JOY A ,  KOLBOW STEVEN P

    IPC: B65D85/48 ,  B65D85/30 ,  G11B33/04 ,  H01L20060101

    Abstract: A SHIPPER FOR MEMORY DISKS COMPRISES A CASSETTE HAVING AN OPEN TOP AND AN OPEN BOTTOM, A TOP COVER TO COVER THE OPEN TOP, AND A BOTTOM COVER THE BOTTOM. THE BODY PORTION HAS OPPOSING SIDE WALLS AND OPPOSING END WALLS. THE TWO SIDE WALLS EACH HAVE WITH A VERTICAL UPPER PORTIONS AND AN INWARDLY CONVERGING BOTTOM PORTION. SAID SIDEWALLS HAVE INWARDLY FACING ELONGATE TEETH OR SPACERS DEFINING SLOTS TO HOLD THE SUBSTRATES IN A VERTICALLY POSITIONED AND SPACED ARRAY. EACH TOOTH IS CONTINUOUS FROM THE OPEN TOP TO THE OPEN BOTTOM AND EACH TOOTH HAS A UPPER VERTICAL PORTION AT THE VERTICAL UPPER PORTION OF THE SIDE WALL AND A CONVERGING LOWER PORTION AT THE BOTTOM PORTION OF THE SIDE WALLS. THE CONVERGING LOWER PORTION OF EACH TOOTH FOLLOWS THE CONVERGENCE OF THE BOTTOM PORTIONS OF THE SIDEWALLS. THE CONVERGING LOWER PORTION OF EACH TOOTH IS CONFIGURED TO BE DIFFERENT THAN THE CONFIGURATION OF THE TOOTH AT THE UPPER PORTION PROVIDING FOR IMPROVED PERFORMANCE IN RECEIVING DISKS TO MINIMIZE OR ELIMINATE THE INCOMPLETE RECEIPT OF DISKS IN THE SLOTS SUCH AS BY THE DISKS CATCHING AND RESTING ON THE TOP OF THE TEETH.

    RETICLE POD
    4.
    发明专利
    RETICLE POD 未知

    公开(公告)号：MY154896A

    公开(公告)日：2015-08-14

    申请号：MYPI20080816

    申请日：2006-09-27

    Applicant: ENTEGRIS INC

    Inventor： KOLBOW STEVEN P ,  JOHN LYSTAD ,  KEVIN MCMULLEN ,  TIEBEN ANTHONY M ,  MATTHEW KUSZ ,  CHRISTIAN ANDERSEN ,  HUAPING WANG ,  MICHAEL CISEWSKI ,  JOHNSON MICHAEL L ,  HALBMAIER DAVID L

    IPC: B65D85/48

    Abstract: A CONTAINER (100) THAT PROVIDES SUPPORT STRUCTURE AND ENVIRONMENTAL CONTROL MEANS INCLUDING, FOR EXAMPLE, MINIMAL CONTACT WITH A WAFER OR RETICLE (110) CONTAINED THEREIN THAT COOPERATES WITH WAFER OR RETICLE (110) TO PROVIDE A DIFFUSION BARRIER MITIGATES AGAINST PARTICLES SETTLING ON A FACE OF THE WAFER OR RETICLE (110). THE CONTAINER (100) INCLUDES A BASE (120) HAVING A FLAT, POLISHED SURFACE WITH PROTRUSIONS UPON WHICH THE WAFER OR RETICLE (110) RESTS. THE PROTRUSIONS ARE OF A GEOMETRY, SUCH AS A SPHERE, THAT IMPARTS MINIMUM CONTACT WITH THE WAFER OR RETICLE (110) AND SUSPENDS THE WAFER OR RETICLE (110) OVER THE BASE (120), PROVIDING A GAP THEREBETWEEN. THE GAP ISOLATES THE WAFER OR RETICLE (110) FROM THE FLAT, POLISHED SURFACE OF THE BASE (120), BUT IS DIMENSIONED TO INHIBIT MIGRATION OF PARTICLES INTO THE GAP, THEREBY PREVENTING CONTAMINATION OF SENSITIVE SURFACES OF THE WAFER OR RETICLE (110). DIFFUSION FILTERS PROVIDE PRESSURE EQUALIZATION WITHOUT FILTER MEDIA. MOVEABLE RETICLE PINS ON THE TOP COVER PROVIDE RETICLE RESTRAINT. DUAL CONTAINMENT POD (1099) EMBODIMENT PROVIDES FURTHER ISOLATION AND PROTECTION.

    Reticle Pod
    7.
    发明专利
    Reticle Pod 未知

    公开(公告)号：SG10201400835QA

    公开(公告)日：2014-07-30

    申请号：SG10201400835Q

    申请日：2006-09-27

    Applicant: ENTEGRIS INC

    Inventor： KOLBOW STEVEN P ,  MCMULLEN KEVIN ,  TIEBEN ANTHONY M ,  KUSZ MATTHEW ,  ANDERSEN CHRISTIAN ,  WANG HUAPING ,  CISEWSKI MICHAEL ,  JOHNSON MICHAEL L ,  HALBMAIER DAVID L ,  LYSTAD JOHN

    Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

    Fluoropolymer flowmeter
    8.
    发明专利
    Fluoropolymer flowmeter 未知

    公开(公告)号：AU2002326302A1

    公开(公告)日：2002-12-16

    申请号：AU2002326302

    申请日：2002-05-28

    Applicant: ENTEGRIS INC

    Inventor： LEYS JOHN A ,  CADAVID CARLOS ,  KOLBOW STEVEN P ,  FISCHER STEVEN A ,  ULSCHMID TODD

    IPC: B29C45/26 ,  B29C65/14 ,  G01F1/22 ,  G01F15/00 ,  G01F1/00 ,  B29C65/12 ,  B29C65/70

    Abstract: In one embodiment, a sight tube flowmeter is formed of a plurality of fluoropolymer components welded together to form a unitary flowmeter body. The components can comprise a PFA upright sight tube having two end portions, a flow conduit extending therethrough and two fitting portions that are uniquely welded onto each end of the sight tube, and a fluoropolymer float device movable to various positions within the flow conduit depending on the flow level of the fluid flowing therethrough. The float device can be of conventional design or for those flowmeter embodiments where low fluid flow rates are to be measured, an elongate float can be utilized. The floats and, in particular, a designated portion thereof, are visible through the sight tube to provide visual indication of the position, and thus the flow rate of fluid flowing through the flowmeter. In addition, alternative embodiments include the implementation of the unique sight tube and elongate float design in conventional flowmeters.

    PURGE SYSTEM FOR A SUBSTRATE CONTAINER
    9.
    发明申请
    PURGE SYSTEM FOR A SUBSTRATE CONTAINER 审中-公开
    一种基板容器的清洗系统

    公开(公告)号：WO2008106622A3

    公开(公告)日：2008-10-23

    申请号：PCT/US2008055388

    申请日：2008-02-28

    Applicant: ENTEGRIS INC ,  TIEBEN ANTHONY MATHIUS ,  HALBMAIER DAVID L ,  KOLBOW STEVEN P

    Inventor： TIEBEN ANTHONY MATHIUS ,  HALBMAIER DAVID L ,  KOLBOW STEVEN P

    IPC: C25F1/00

    CPC classification number: H01L21/67353 ,  H01L21/67017 ,  H01L21/67359 ,  H01L21/67386 ,  H01L21/67393 ,  Y10S414/14

    Abstract: A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

    Abstract translation: 具有基板容器接收区的吹扫台，其具有至少一个向上延伸的吹扫喷嘴。 喷嘴具有圆形的接合唇缘。 基板容器具有用于至少一个基板的支撑装置和吹扫端口组件，吹扫端口组件包括从容器朝下的面向外的密封凸缘。 密封凸缘具有中心孔和悬臂凸缘部分，该凸缘部分与喷嘴的圆形接合唇缘接合。 由凸缘的can状部分承载的喷嘴上的基底容器的重量引起凸缘的弯曲以用于弹性软密封。

    SHIPPER WITH TOOTH DESIGN FOR IMPROVED LOADING
    10.
    发明申请
    SHIPPER WITH TOOTH DESIGN FOR IMPROVED LOADING 审中-公开
    用于改进装载的托盘设计

    公开(公告)号：WO2005036609A3

    公开(公告)日：2005-09-29

    申请号：PCT/US2004033641

    申请日：2004-10-12

    Applicant: ENTEGRIS INC ,  DUBAN-HU JOY A ,  KOLBOW STEVEN P

    Inventor： DUBAN-HU JOY A ,  KOLBOW STEVEN P

    IPC: B65D85/30 ,  B65D85/48 ,  G11B33/04 ,  H01L20060101

    CPC classification number: G11B33/0444 ,  Y10S206/832

    Abstract: A shipper for memory disks comprises a cassette having an open top and an open bottom, a top cover to cover the open top, and a bottom cover to cover the bottom. The body portion has opposing sidewalk and opposing end walls. The two sidewalk each have with a vertical upper portions and an inwardly converging bottom portion. Said sidewalk have inwardly facing elongate teeth or spacers defining slots to hold the substrates in a vertically positioned and spaced array. Each tooth is continuous from the open top to the open bottom and each tooth has a upper vertical portion at the vertical upper portion of the side wall and a converging lower portion at the bottom portion of the sidewalks.

    Abstract translation: 用于记忆盘的托运人包括具有开口顶部和开放底部的盒子，覆盖开放顶部的顶盖以及覆盖底部的底盖。 身体部分具有相对的人行道和相对的端壁。 两个人行道各自具有垂直的上部和向内会聚的底部。 所述人行道具有面向内的细长齿或限定狭槽的间隔件，以将基底保持在垂直定位和间隔的阵列中。 每个齿从敞开的顶部连续到开放的底部，并且每个齿在侧壁的垂直上部具有上垂直部分，在人行道的底部具有会聚下部。

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