公开(公告)号：JPH0324431A

公开(公告)日：1991-02-01

申请号：JP14715590

申请日：1990-06-05

Applicant: ESSILOR INT

Inventor： PATORITSUKU BERUTORAN

IPC: G01M11/00 ,  G01B11/255 ,  G01M11/02 ,  G02B27/44 ,  G02B27/52

Abstract: PURPOSE: To inspect an arbitrary optical system by performing a calibration while taking account of the theoretical aberration and the aberration caused by manufacture of an adaptor and a compensation element. CONSTITUTION: This equipment comprises a light emitting means 13 constituting a light source 12 on the optical path, a holding station 15 receiving an optical system 10 under inspection, an array 16, and means 17 receiving an image which can be observed in the downstream of the array 16. The equipment further comprises a data processing means 18 utilizing the image through phase detection, and a separator element 26 constituting a half-reflective surface on the axis of optical path between the light source 12 and the holding station 15. The image receiving means 17 is disposed on the side part while being arranged with the separator element 26. The data processing means 18 comprises a light beam plot program, and a calibration means where the theoretical aberration and the manufacturing aberration of the separator element 26 are taken into account. According to the arrangement, an arbitrary optical system 10 or a plane can be inspected accurately.

公开(公告)号：JPH0324432A

公开(公告)日：1991-02-01

申请号：JP14715690

申请日：1990-06-05

Applicant: ESSILOR INT

Inventor： PATORITSUKU BERUTORAN

IPC: G01M11/00 ,  G01M11/02

Abstract: PURPOSE: To inspect an plane of an optical system accurately by arranging a converging adaptor element between a holding station and an array. CONSTITUTION: This equipment 12 comprises a light emitting means 13 constituting a light source on the optical path, a holding station 15 receiving an optical system 10 under inspection, an array 16, means 17 for receiving an image in the downstream of the array 16, and a data processing means 18 utilizing the image through phase detection. Furthermore, a converging adaptor element 30 is disposed between the holding station 15 and the array 16 and the data processing means 18 comprises a light beam plot program, and a calibration means where the theoretical aberration and the manufacturing aberration of the conversion adaptor element 30 are taken into account. According to the arrangement, a plane of the optical system 10 can be inspected accurately.