公开(公告)号：CA2148122A1

公开(公告)日：1994-05-11

申请号：CA2148122

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： BOHAN MICHAEL ,  ALLEN PAUL C ,  RIEGER MICHAEL ,  JOLLEY MATTHEW J ,  TEITZEL ROBIN L ,  THOMAS TIMOTHY

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  H01L21/268

Abstract: 2148122 9409989 PCTABS00032 An improved laser pattern generation apparatus. The improved pattern generation apparatus of the present invention uses a laser beam (501) to expose a radiant sensitive film on the workpiece (516) to print circuit patterns on a substrate. The laser beam is aligned using a beam steering means. The laser beam (501) is split into 32 beams to create a brush. The brush scans the workpiece (516) through use of a rotating polygonal mirror (510). Each beam of the brush may have one of seventeen intensity values. The beams are modulated by an Acousto-Optical Modulator (506) signals provided to the Acousto-Optical Modulator (506) define the pattern to be generated. The signals are created by a rasterizer (507) increased print speed is accomplished through the use of a wider brush and a print strategy that eliminates physical stage passes.

公开(公告)号：AU5410394A

公开(公告)日：1994-05-24

申请号：AU5410394

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： ALLEN PAUL C ,  JOLLEY MATTHEW J ,  TEITZEL ROBIN L ,  RIEGER MICHAEL ,  BOHAN MICHAEL ,  THOMAS TIMOTHY

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  B41J2/435 ,  H04N1/21

Abstract: A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.

公开(公告)号：DE811882T1

公开(公告)日：1998-10-22

申请号：DE97202325

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： ALLEN PAUL C ,  TEITZEL ROBIN L ,  JOLLEY MATTHEW J ,  RIEGER MICHAEL

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  B23K26/06

Abstract: A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.

公开(公告)号：DE69326079T2

公开(公告)日：2000-03-16

申请号：DE69326079

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： ALLEN PAUL ,  JOLLEY MATTHEW ,  TEITZEL ROBIN ,  RIEGER MICHAEL ,  BOHAN MICHAEL ,  THOMAS TIMOTHY

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  B41J2/435 ,  H04N1/21

Abstract: A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.

公开(公告)号：DE69326079D1

公开(公告)日：1999-09-23

申请号：DE69326079

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： ALLEN PAUL ,  JOLLEY MATTHEW ,  TEITZEL ROBIN ,  RIEGER MICHAEL ,  BOHAN MICHAEL ,  THOMAS TIMOTHY

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  B41J2/435 ,  H04N1/21

Abstract: A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.

公开(公告)号：EP0670784A4

公开(公告)日：1996-06-05

申请号：EP93924402

申请日：1993-10-22

Applicant: ETEC SYSTEMS INC

Inventor： ALLEN PAUL C ,  JOLLEY MATTHEW J ,  TEITZEL ROBIN L ,  RIEGER MICHAEL ,  BOHAN MICHAEL ,  THOMAS TIMOTHY

IPC: G01D15/16 ,  B23K26/04 ,  B23K26/067 ,  G02B26/12 ,  G03F7/20 ,  H01L21/027 ,  H04N1/047 ,  H04N1/113 ,  H04N1/191 ,  B41J2/435 ,  H04N1/21

CPC classification number: B23K26/0676 ,  B23K26/04 ,  B23K26/043 ,  B23K26/067 ,  G02B26/123 ,  G02B27/106 ,  G02B27/144 ,  G02B27/148 ,  G03F7/70075 ,  G03F7/704 ,  H04N1/047 ,  H04N1/113 ,  H04N1/1911 ,  H04N2201/02416 ,  H04N2201/02425 ,  H04N2201/02439 ,  H04N2201/03108 ,  H04N2201/0471 ,  H04N2201/04712 ,  H04N2201/04729 ,  H04N2201/04731 ,  H04N2201/04734 ,  H04N2201/04739 ,  H04N2201/04744 ,  H04N2201/04755 ,  H04N2201/04756 ,  H04N2201/04762 ,  H04N2201/04786 ,  H04N2201/04789 ,  H04N2201/04791 ,  H04N2201/04794

Abstract: A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.