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公开(公告)号:WO2003017310A1
公开(公告)日:2003-02-27
申请号:PCT/US2002/025171
申请日:2002-08-08
Applicant: EXTREME DEVICES INCORPORATED
Inventor: WINDISCHMANN, Henry , SCHUELLER, Randolph, D. , ZOLLERS, Brian, G. , JAMISON, Keith, D. , PATTERSON, Donald, E.
IPC: H01J1/304
CPC classification number: H01J1/3042 , H01J2201/319
Abstract: An array of carbon-based emitters is provided having more uniform electron emission over the area of the array. This is made possible by a resistive layer that is present below each of the emission tips. Both organic and inorganic resistive layers may be grown under the emitting carbon-based material. A conductive backing layer is in contact with the resistive layer. Methods for making the improved array are provided. The methods include growth of carbon-based tips in a mold, removal of various films or portions of films by etching, and other techniques.
Abstract translation: 提供了在阵列的区域上具有更均匀的电子发射的碳基发射体的阵列。 这通过存在于每个发射尖端下面的电阻层成为可能。 有机和无机电阻层都可以在发射碳基材料下生长。 导电背衬层与电阻层接触。 提供了改进阵列的方法。 这些方法包括在模具中生长碳基尖端,通过蚀刻去除各种膜或部分膜以及其它技术。