公开(公告)号：US20130146770A1

公开(公告)日：2013-06-13

申请号：US13685282

申请日：2012-11-26

Applicant: Electronics and Telecommunications Research In

Inventor： Dong Suk JUN ,  Kwang-Yong Kang ,  Han-Cheol Ryu ,  Je Ha Kim

IPC: H01L27/146

CPC classification number: H01L27/14625 ,  G01N21/3581 ,  G01N2201/103

Abstract: A terahertz continuous wave system in accordance with the inventive concept may include a terahertz wave generator generating a terahertz continuous wave; a non-destructive detector measuring a change of the terahertz continuous wave by emitting the generated terahertz continuous wave to a sample and controlling a focal point of the emitted terahertz continuous wave while two-dimensionally moving the sample at predetermined intervals; and a three-dimensional image processor obtaining a three-dimensional image using two-dimensional images corresponding to the measured terahertz continuous wave.

Abstract translation: 根据本发明构思的太赫兹连续波系可包括产生太赫兹连续波的太赫兹波发生器; 通过将所产生的太赫兹连续波发射到样品并且以预定间隔二维地移动样本来控制发射的太赫兹连续波的焦点来测量太赫兹连续波的变化的非破坏性检测器; 以及使用对应于所测量的太赫兹连续波的二维图像获得三维图像的三维图像处理器。