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    FLEXIBLE PRESSURE SENSOR
    1.
    发明公开
    FLEXIBLE PRESSURE SENSOR 审中-公开

    公开(公告)号：US20240011850A1

    公开(公告)日：2024-01-11

    申请号：US18347163

    申请日：2023-07-05

    Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE ,  Korea Advanced Institute of Science and Technology

    Inventor： HANBIT JIN ,  Steve PARK ,  Hye Jin KIM ,  Seyoung KWON ,  Gyeongsuk PARK ,  WOOSEUP YOUM

    IPC: G01L1/18

    CPC classification number: G01L1/18

    Abstract: Provided is a flexible pressure sensor. The flexible pressure includes: a lower structure; and an upper structure on the lower structure, wherein the lower structure includes: a flexible substrate; and first electrodes on the flexible substrate and second electrode spaced apart from the first electrodes, and the upper structure includes: a support; first protrusion structures integrally connected to the support to protrude from a bottom surface of the support; and second protrusion structures integrally connected to the support to protrude from the bottom surface of the support, the second protrusion structures being spaced apart from the first protrusion structures, wherein the first protrusion structures are in contact with a top surface of the flexible substrate, the second protrusion structures are vertically spaced apart from the first and second electrodes, and when viewed in a plan view, the first protrusion structures are configured to completely surround the second protrusion structures.

    LEARNING-BASED DIE-TO-DIE MASK INSPECTION APPARATUS AND METHOD
    3.
    发明申请
    LEARNING-BASED DIE-TO-DIE MASK INSPECTION APPARATUS AND METHOD 有权

    公开(公告)号：US20250117948A1

    公开(公告)日：2025-04-10

    申请号：US18907443

    申请日：2024-10-04

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Hye Jin KIM

    IPC: G06T7/11 ,  G03F1/84 ,  G06T7/00

    Abstract: The present invention relates to a learning-based die-to-die mask inspection apparatus and method. The learning-based die-to-die mask inspection apparatus includes an image sensor that acquires images of dies of a mask, a model generation unit that generates a clean mask using a pre-trained model, and a processor that generates crop data of corresponding pairs for the same region of the dies from the images acquired by the image sensor, inputs the crop data to the model generation unit, receives the clean mask from the model generation unit, and then detects a defect in each of the dies through the crop data and the clean mask.

    PIXEL CIRCUIT FOR CONFIGURING ACTIVE INPUT ARRAY AND INPUT DEVICE INCLUDING THE SAME
    4.
    发明申请
    PIXEL CIRCUIT FOR CONFIGURING ACTIVE INPUT ARRAY AND INPUT DEVICE INCLUDING THE SAME 审中-公开

    公开(公告)号：US20200072665A1

    公开(公告)日：2020-03-05

    申请号：US16552550

    申请日：2019-08-27

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： CHUNWON BYUN ,  Young-deuk JEON ,  Chi-Sun HWANG ,  Chan-mo KANG ,  Yun-Jeong KIM ,  Hye Jin KIM ,  Seongdeok AHN ,  JEONG IK LEE ,  Seong Hyun KIM ,  Bock Soon NA

    IPC: G01J1/46 ,  G06F3/01 ,  G01L9/08

    Abstract: Provided is a pixel circuit. The pixel circuit includes a conversion element configured to form a voltage of an input level corresponding to a magnitude of a received energy at a first node, a first transistor configured to adjust the voltage of the first node to a first level in response to a first signal received at a first time interval, a first capacitive element configured to form a voltage at a second node based on the voltage of the first node, a second transistor configured to adjust a level of the voltage of the second node to a second level in response to the first signal, a third transistor configured to form a voltage at a third node, the voltage having a level corresponding to the level of the voltage of the second node, a fourth transistor configured to output a current corresponding to the voltage of the third node in response to a second signal received in a second time interval after the first time interval, and a fifth transistor configured to adjust the voltage of the third node to a third level in response to a third signal received in a third time interval after the second time interval.

    BALLISTOCARDIOGRAM SENSOR
    5.
    发明公开
    BALLISTOCARDIOGRAM SENSOR 审中-公开

    公开(公告)号：US20240081683A1

    公开(公告)日：2024-03-14

    申请号：US18364081

    申请日：2023-08-02

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Chaehyun LIM ,  Hye Jin KIM

    IPC: A61B5/11

    CPC classification number: A61B5/1102

    Abstract: A ballistocardiogram sensor according to an embodiment of the inventive concept includes a lower substrate including a support part, a plurality of connection parts, and a vertical movement part, a lower electrode on the lower substrate, a piezoelectric sensing layer on the lower electrode, and an upper electrode on the piezoelectric sensing layer. The vertical movement part is spaced apart from the support part with the connection parts therebetween. The connection parts connect the vertical movement part and the support part. The piezoelectric sensing layer vertically overlaps the vertical movement part. The connection parts may have a serpentine shape.

    PIEZOELECTRIC DEVICE
    6.
    发明申请
    PIEZOELECTRIC DEVICE 有权

    公开(公告)号：US20210384848A1

    公开(公告)日：2021-12-09

    申请号：US17237653

    申请日：2021-04-22

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： HANBIT JIN ,  Hye Jin KIM ,  Yun-Jeong KIM ,  YuLim MIN ,  WOOSEUP YOUM ,  JoonMin LEE ,  Chan-Hwa HONG

    IPC: H02N2/04

    Abstract: The present disclosure relates to a piezoelectric device, and more particularly, to a piezoelectric device including: a piezoelectric actuator; a displacement transmission structure disposed on the piezoelectric actuator; and a displacement amplification structure disposed between the piezoelectric actuator and the displacement transmission structure. Here, the displacement amplification structure includes: a first displacement amplification structure and a second displacement amplification structure, which cross each other; and a fixing pin that passes through the first displacement amplification structure and the second displacement amplification structure to connect the first displacement amplification structure and the second displacement amplification structure. Also, each of one end of the first displacement amplification structure and one end of the second displacement amplification structure may be fixed on the piezoelectric actuator.

    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME 有权
    具有挠性铰链膜片的冷凝器麦克风及其制造方法

    公开(公告)号：US20130244365A1

    公开(公告)日：2013-09-19

    申请号：US13791039

    申请日：2013-03-08

    Applicant: Electronics and Telecommunications Research Institute

    Inventor： Hye Jin KIM ,  Sung Q LEE ,  Kang Ho PARK ,  Jong Dae KIM

    IPC: H04R31/00

    CPC classification number: H04R31/003 ,  H04R19/005 ,  H04R31/00 ,  H04R2499/11

    Abstract: A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.

    Abstract translation: 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤：形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜，并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此，制造工艺可以提高电容传声器的灵敏度和减小尺寸。

    WEARABLE MUSCLE ACTIVITY MEASUREMENT DEVICE FOR DIAGNOSING MUSCLE CONDITION
    9.
    发明申请
    WEARABLE MUSCLE ACTIVITY MEASUREMENT DEVICE FOR DIAGNOSING MUSCLE CONDITION 有权

    公开(公告)号：US20250152042A1

    公开(公告)日：2025-05-15

    申请号：US18937546

    申请日：2024-11-05

    Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

    Inventor： YunJeong KIM ,  Hye Jin KIM ,  Hanbit JIN

    IPC: A61B5/11 ,  A61B5/00

    Abstract: Provided is a wearable muscle activity measurement device for diagnosing a muscle condition, and a muscle activity measurement method thereof. The device includes a main substrate, a communication module connected to the main substrate, air pockets provided on one side of the main substrate adjacent to the communication module, a motion sensor provided on the other side of the main substrate opposing the air pockets, mechanomyography sensors provided on the center of the main substrate between the motion sensor and the air pockets to detect vibration signals; and a force myography sensor provided on the main substrate between the mechanomyography sensors to detect pressure signals.

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